As^o

As₂O₃

As₂O₅

As₂S₃

AlGaAs

XPS Spectra
Arsenic (As) Compounds
The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra.
Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.
Peak-fits are guides for practical, real-world applications. Peak-fits are not fully optimized or designed to test any theory.

Arsenic Pent-oxide (As₂O₅)
Survey, Peak-fits, BEs, FWHMs, and Peak Labels

→ Periodic Table	→ Six (6) BE Tables
Survey Spectrum from As₂O₅ Freshly exposed bulk, Flood gun is ON C (1s) BE = 285.0 eV, Ag (3d_5/2) FWHM = 1.5 eV


→ Periodic Table	→ Six (6) BE Tables
As (3d) Spectrum from As₂O₅– Raw Fresh exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV	As (3d) Spectrum from As₂O₅– Peak-Fit Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
O (1s) Spectrum from As₂O₅– Raw Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV	O (1s) Spectrum from As₂O₅– Peak-fit Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
C (1s) Spectrum from As₂O₅– As measured Freshly exposed bulk, Flood gun is ON, C (1s) BE = 284.78 eV, Ag FWHM = 0.75 eV	C (1s) Spectrum from As₂O₅– Peak-Fit Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
As (KLL) Auger Spectrum from As₂O₅– Raw – survey Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV	Valence Band Signals from As₂O₅– Raw Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV



Overlays
→ Periodic Table	→ Six (6) BE Tables
Valence Band Spectra – Overlay of As^o and As₂O₅ Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV	As (3d) Spectra – Overlay of As^o and As₂O₅ Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV



→ Periodic Table	→ Six (6) BE Tables
	As (3d) Spectra – Overlay of As^o, As₂O₃ and As₂O₅ Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV


End-of-spectra Price to purchase raw data sets: Raw spectra – VAMAS ASCII format ($6) Raw spectra – SDP binary format ($5) SDP v9 – $145 (3 yr license) Transmission Function Tests

December 2015 – Transmission Function of Thermo K-Znpha Plus

→ Periodic Table

Survey Spectra of Ion Etched Copper (Cr), PEs = 50, 100, 150 and 200 eV

→ Periodic Table

March 2016 – Transmission Function of Thermo K-Znpha Plus

Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 150 and 200 eV

→ Periodic Table

August 2019 – Transmission Function of Thermo K-Znpha Plus

Survey Spectra of HOPG (C), PEs = 20, 50, 100 and 200 eV

→ Periodic Table

January 2022 – Transmission Function of Thermo K-Znpha Plus

Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 120, 140, 160, 180 and 200 eV

→ Periodic Table

Six (6) Chemical State Tables of As (3d_5/2) *BEs***

The XPS Library Spectra-Base
PHI Handbook
Thermo-Scientific Website
XPSfitting Website
Techdb Website
NIST Website

→ Periodic Table

Notes of Caution when using Published BEs and BE Tables from Insulators and Conductors:

Accuracy of Published BEs
- The accuracy depends on the calibration BEs used to calibrate the energy scale of the instrument. Cu (2p3/2) BE can vary from 932.2 to 932.8 eV for old publications
- Different authors use different BEs for the C (1s) BE of the hydrocarbons found in adventitious carbon that appears on all materials and samples. From 284.2 to 285.3 eV
- The accuracy depends on when the authors last checked or adjusted their energy scale to produce the expected calibration BEs
Worldwide Differences in Energy Scale Calibrations
- For various reasons authors still use older energy scale calibrations
- Some authors still adjust their energy scale so Cu (2p3/2) appears at 932.2 eV or 932.8 eV because this is what the maker taught them
- This range causes BEs in the higher BE end to be larger than expected
- This variation increases significantly above 600 eV BE
Charge Compensation
- Samples that behave as true insulators normally require the use of a charge neutralizer (electron flood gun with or without Ar+ ions) so that the measured chemical state spectra can be produced without peak-shape distortions or sloping tails on the low BE side of the peak envelop.
- Floating all samples (conductive, semi-conductive, and non-conductive) and always using the electron flood gun is considered to produce more reliable BEs and is recommended.
Charge Referencing Methods for Insulators
- Charge referencing is a common method, but it can produce results that are less reliable.
- When an electron flood gun is used, the BE scale will usually shift to lower BE values by 0.01 to 5.0 eV depending on your voltage setting. Normally, to correct for this flood gun induced shift, the BE of the hydrocarbon C (1s) peak maximum from adventitious carbon is used to correct for the charge induced shift.
- The hydrocarbon peak is normally the largest peak at the lowest BE.
- Depending on your preference or training, the C (1s) BE assigned to this hydrocarbon peak varies from 284.8 to 285.0 eV. Other BEs can be as low as 284.2 eV or as high as 285.3 eV
- Native oxides that still show the pure metal can suffer differential charging that causes the C (1s) and the O (1s) and the Metal Oxide BE to be larger
- When using the electron flood gun, the instrument operator should adjust the voltage and the XY position of the electron flood gun to produce peaks from a strong XPS signal (eg O (1s) or C (1s) having the most narrow FWHM and the lowest experimentally measured BE.

→ Periodic Table

Table #1

As (3d_5/2) Chemical State BEs from: “The XPS Library Spectra-Base”

C (1s) BE = 285.0 eV for TXL BEs
and C (1s) BE = 284.8 eV for NIST BEs

Element	Atomic #	Compound	As-Measured by TXL or NIST Average BE	Largest BE	Hydrocarbon C (1s) BE	Source
As	33	InAs (N*4)	40.6 eV	41.5 eV	284.8 eV	Avg BE – NIST
As	33	GaAs (N*14)	40.8 eV	41.5 eV	284.8 eV	Avg BE – NIST
As	33	GaAs	41.0 eV	41.7 eV	285.0 eV	The XPS Library
As	33	AlGaAs	41.1 eV	41.4 eV	285.0 eV	The XPS Library
As	33	GaInAs	41.4 eV		285.0 eV	The XPS Library
As	33	As – element	41.8 eV		285.0 eV	The XPS Library
As	33	As-2Se3 (N*5)	42.9 eV		284.8 eV	Avg BE – NIST
As	33	As-2S3	43.7 eV		285.0 eV	The XPS Library
As	33	As-I3 (N*1)	43.5 eV		284.8 eV	Avg BE – NIST
As	33	As-4S4	43.9 eV		285.0 eV	The XPS Library
As	33	As-2O3 (N*9)	44.1 eV	44.9 eV	284.8 eV	Avg BE – NIST
As	33	Na-AsO2 (N*3)	44.2 eV	44.9 eV	284.8 eV	Avg BE – NIST
As	33	As-2O5	44.9 eV		285.0 eV	The XPS Library
As	33	As-2O5 (N*4)	45.7 eV	46.5 eV	284.8 eV	Avg BE – NIST
As	33	As-F3 (N*1)	47.1 eV		284.8 eV	Avg BE – NIST
As	33	As-(OH)2			285.0 eV	The XPS Library

Charge Referencing Notes

(N*number) identifies the number of NIST BEs that were averaged to produce the BE in the middle column.
The XPS Library uses Binding Energy Scale Calibration with Cu (2p3/2) BE = 932.62 eV and Au (3d_7/2) BE = 83.98 eV. BE (eV) Uncertainty Range: +/- 0.2 eV
Charge Referencing of insulators is defined such that the Adventitious Hydrocarbon C (1s) BE (eV) = 285.0 eV. NIST uses C (1s) BE = 284.8 eV
Note: Ion etching removes adventitious carbon, implants Ar (+), changes conductivity of surface, and degrades chemistry of various chemical states.
Note: Ion Etching changes BE of C (1s) hydrocarbon peak.
TXL – abbreviation for: “The XPS Library” (https://xpslibrary.com). NIST: National Institute for Science and Technology (in USA)

→ Periodic Table

Table #2

As (3d_5/2) Chemical State BEs from: “PHI Handbook”

C (1s) BE = 284.8 eV

→ Periodic Table

Table #3

As (3d_5/2) Chemical State BEs from: “Thermo-Scientific” Website

C (1s) BE = 284.8 eV

Chemical state	Binding energy (eV), As (3d_5/2)
GaAs	40.8
As₂O₃	44.1
As³⁺ (GaAs native oxide)	44.8
As⁵⁺ (GaAs native oxide)	45.6

→ Periodic Table

Table #4

As (3d_5/2) Chemical State BEs from: “XPSfitting” Website

Chemical State BE Table derived by Averaging BEs in the NIST XPS database of BEs
C (1s) BE = 284.8 eV

→ Periodic Table

Table #5

As (3d_5/2) Chemical State BEs from: “Techdb.podzone.net” Website

XPS Spectra – Chemical Shift | Binding Energy
C (1s) BE = 284.6 eV

XPS(X線光電子分光法)スペクトル化学状態化学シフトケミカルシフト

Element	Level	Compound	B.E.(eV)		min		max
As	3d5/2	InAs	40.7	±0.3	40.4	～	40.9
As	3d5/2	GaAs	40.8	±0.1	40.7	～	40.9
As	3d5/2	AlAs	41.0	±0.2	40.8	～	41.2
As	3d5/2	AlGaAs	41.0	±0.2	40.8	～	41.2
As	3d5/2	As	41.6	±0.2	41.4	～	41.8
As	3d5/2	AsI3	43.5	±0.3	43.2	～	43.7
As	3d5/2	Sulfides	43.6	±0.5	43.1	～	44.0
As	3d5/2	As2O3	45.0	±0.3	44.7	～	45.2
As	3d5/2	AsBr3	45.3	±0.3	45.0	～	45.5
As	3d5/2	As2O5	46.1	±0.2	45.9	～	46.3

→ Periodic Table

Histograms of NIST BEs for As (3d_5/2) BEs

Important Note: NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Histogram indicates: 41.7 eV for As^o based on 13 literature BEs	Histogram indicates: 44.8 eV for As₂O₃ based on 11 literature BEs

Table #6

NIST Database of As (3d_5/2) Binding Energies

NIST Standard Reference Database 20, Version 4.1

Data compiled and evaluated
by
Alexander V. Naumkin, Anna Kraut-Vass, Stephen W. Gaarenstroom, and Cedric J. Powell
©2012 copyright by the U.S. Secretary of Commerce on behalf of the United States of America. All rights reserved.

Important Note: NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Element	Spectral Line	Formula	Energy (eV)	Reference
As	3d	GaAs/Y	39.60	Click
As	3d5/2	H2O/GaAs	40.20	Click
As	3d	GaAs/Y	40.30	Click
As	3d5/2	GaAs	40.30	Click
As	3d5/2	H2S/GaAs	40.30	Click
As	3d5/2	GaAs	40.30	Click
As	3d	In0.52Al0.48As	40.43	Click
As	3d5/2	UAs	40.47	Click
As	3d	GaAs	40.60	Click
As	3d	InAs	40.61	Click
As	3d	In0.53Ga0.47As	40.69	Click
As	3d	GaAs	40.70	Click
As	3d5/2	GaAs0.68	40.70	Click
As	3d5/2	GaAs0.87	40.70	Click
As	3d5/2	Au/GaAs	40.72	Click
As	3d5/2	In0.75Ga0.25As/InP	40.75	Click
As	3d5/2	In0.3Ga0.7As/InP	40.75	Click
As	3d	GaAs	40.76	Click
As	3d5/2	InAs	40.78	Click
As	3d5/2	Ga0.47In0.53As	40.79	Click
As	3d	GaAs	40.80	Click
As	3d	NbAs	40.80	Click
As	3d5/2	Cl2/GaAs0.96	40.80	Click
As	3d5/2	Au/GaAs	40.80	Click
As	3d5/2	InAs	40.80	Click
As	3d	GaAs	40.90	Click
As	3d	As15In54Sb31	40.90	Click
As	3d	Al0.4Ga0.6As	41.00	Click
As	3d	AlAs	41.00	Click
As	3d	AlAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	GaAs	41.00	Click
As	3d	(In,Ga)AsOx	41.00	Click
As	3d	InAs	41.00	Click
As	3d	InAs	41.00	Click
As	3d	Ga0.47In0.53As	41.06	Click
As	3d5/2	GaAs	41.09	Click
As	3d	GaAs	41.20	Click
As	3d	GaAs	41.20	Click
As	3d	GaAs	41.30	Click
As	3d	GaAs	41.30	Click
As	3d	(C2H5)3Ga/GaAs	41.30	Click
As	3d	GaAsOx	41.30	Click
As	3d	GaAs	41.33	Click
As	3d	GaAs	41.34	Click
As	3d	GaAs	41.40	Click
As	3d	GaAs	41.40	Click
As	3d	GaAs	41.40	Click
As	3d5/2	As	41.40	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	O2/As/Si	41.48	Click
As	3d5/2	As/Si	41.48	Click
As	3d5/2	As/Si	41.48	Click
As	3d5/2	As/Si	41.48	Click
As	3d	As	41.50	Click
As	3d	As	41.50	Click
As	3d	As	41.50	Click
As	3d	As	41.50	Click
As	3d	As	41.50	Click
As	3d	InAs	41.50	Click
As	3d	GaAs	41.50	Click
As	3d	GaAs	41.50	Click
As	3d	GaAs	41.50	Click
As	3d	GaAs	41.50	Click
As	3d5/2	GaAs	41.50	Click
As	3d5/2	GaAs	41.56	Click
As	3d	As	41.60	Click
As	3d	GaAs	41.60	Click
As	3d5/2	As	41.62	Click
As	3d	As	41.70	Click
As	3d	As	41.80	Click
As	3d	As	41.80	Click
As	3d5/2	GaAs	41.85	Click
As	3d	As	41.90	Click
As	3d	As	41.90	Click
As	3d	As	41.90	Click
As	3d	Ga2Mo5As4	41.90	Click
As	3d	Cu4Mo5As4	41.90	Click
As	3d	Mo5As4	41.90	Click
As	3d	As	42.00	Click
As	3d	As	42.00	Click
As	3d5/2	As2O/n-GaAs	42.00	Click
As	3d	As	42.10	Click
As	3d	[As(C6H5)3]	42.40	Click
As	3d	As4S4	42.50	Click
As	3d	[Tc((CH3)2AsC6H4As(CH3)2)2Br2]Br	42.60	Click
As	3d	As2S3	42.70	Click
As	3d	[As(C6H5)3]	42.76	Click
As	3d	[As(C6H5)3]	42.80	Click
As	3d	As2Se3	42.90	Click
As	3d	As2Se3	42.90	Click
As	3d	As2Se3	42.90	Click
As	3d	As2Se3	42.90	Click
As	3d	As2S3	42.90	Click
As	3d	As2Se3	43.00	Click
As	3d	As40Bi10Se50	43.00	Click
As	3d	[As(C6H5)3]	43.10	Click
As	3d	As4S4	43.10	Click
As	3d	[W(CO)5(As(C6H5)3)]	43.21	Click
As	3d	[Mo(CO)5(As(C6H5)3)]	43.24	Click
As	3d	[CoCl2(C6H4(As(CH3)2)2)]ClO4	43.30	Click
As	3d	[Fe(NO)I(C6H4(As(CH3)2)2)]I	43.30	Click
As	3d	[BBr3(As(C6H5)3)]	43.30	Click
As	3d	As40Bi4Se56	43.30	Click
As	3d	[Cr(CO)5(As(C6H5)3)]	43.37	Click
As	3d	[CoH2(C6H4(As(CH3)2)2)]ClO4	43.40	Click
As	3d	As2S3	43.40	Click
As	3d	[MnBr(CO)4(As(C6H5)3)]	43.50	Click
As	3d	[Fe(NCS)2(C6H4(As(CH3)2)2)2]	43.50	Click
As	3d	[FeCl(NO2)(C6H4(As(CH3)2)2)]	43.50	Click
As	3d	AsI3	43.50	Click
As	3d	CH3AsI2	43.50	Click
As	3d	As2S5	43.50	Click
As	3d	[CoBr2(C6H4(As(CH3)2)2)2]	43.60	Click
As	3d	[AuCl(As(C6H5)3)]	43.60	Click
As	3d	[PdCl2((C6H5)2AsCH2As(C6H5)2)2]	43.60	Click
As	3d	[As(CH3-C6H4)3]2ClRuCl3RuCl[As(CH3-C6H4)3]2	43.60	Click
As	3d	[As(CH3-C6H4)3]3RuCl3RuCl2[As(CH3-C6H4)3]	43.60	Click
As	3d	As2Se3	43.70	Click
As	3d	[As(CH3-C6H4)3]2ClRuCl3RuCl2[As(CH3-C6H4)3]	43.70	Click
As	3d	[FeCl2(C6H4(As(CH3)2)2)2]	43.80	Click
As	3d	[BI3(As(C6H5)3)]	43.88	Click
As	3d	[As(CH3)3]S	43.90	Click
As	3d	As2O3	43.90	Click
As	3d	[As(C6H5)3]S	44.10	Click
As	3d	As2O3	44.10	Click
As	3d	[AsS(C6H5)3]	44.16	Click
As	3d	(C6H5)3As(CHCOOCH3)	44.20	Click
As	3d	[AsO(C6H5)3]	44.20	Click
As	3d	[(C6H5)3As(CHCOC6H5)]	44.20	Click
As	3d	NaAsO2	44.20	Click
As	3d	As2O3	44.20	Click
As	3d	[As(C6H5)3(CH3)]Br	44.20	Click
As	3d	[(C6H5)3AsCH3]Br	44.20	Click
As	3d	[AsO(C6H5)3]	44.30	Click
As	3d	NaAsO2	44.30	Click
As	3d	[As((C6H5)2OOH)]	44.40	Click
As	3d	[AsO(C6H5)3]	44.40	Click
As	3d	As2O3	44.40	Click
As	3d	K3AsO4	44.40	Click
As	3d	As2S5	44.40	Click
As	3d	[(OH)2As(C6H5)3]	44.50	Click
As	3d	(CH3)2AsOOH	44.50	Click
As	3d5/2	AsO/n-GaAs	44.50	Click
As	3d	[As(C6H5)4]Br	44.53	Click
As	3d	[As(C6H5)4]I	44.61	Click
As	3d	[As(C6H5)4]Br	44.70	Click
As	3d	[(C6H5)3As(CH2C(O)C6H5)]Br	44.70	Click
As	3d	As2O3	44.70	Click
As	3d	As2O3	44.70	Click
As	3d	GaAsOx	44.70	Click
As	3d	As2O3	44.80	Click
As	3d	As2O3	44.80	Click
As	3d	As2O3	44.90	Click
As	3d	Na3AsO4	44.90	Click
As	3d	NaAsO2	44.90	Click
As	3d	As2O3	44.90	Click
As	3d	As2O3	44.90	Click
As	3d5/2	As2O3	44.90	Click
As	3d	C4H10HAsO3	45.00	Click
As	3d	As2O3	45.00	Click
As	3d	As2O3	45.00	Click
As	3d	NaAsO2	45.00	Click
As	3d5/2	As2O3/n-GaAs	45.00	Click
As	3d	(C6H5)As(O)(OH)2	45.10	Click
As	3d	NaAsO3	45.20	Click
As	3d	AsBr3	45.30	Click
As	3d	As2O3	45.40	Click
As	3d	Na4As2O7	45.40	Click
As	3d	(In,Ga)AsOx	45.40	Click
As	3d	Na2HAsO4	45.50	Click
As	3d	InAsO4	45.50	Click
As	3d	Na2HAsO4	45.60	Click
As	3d	As2O5	45.70	Click
As	3d	As2O5	45.80	Click
As	3d	As2O5	45.80	Click
As	3d	Ga(AsO3)3	45.80	Click
As	3d5/2	As2O5/n-GaAs	45.80	Click
As	3d	As2O5	45.90	Click
As	3d	(C6H5)As(O)(OH)2	46.10	Click
As	3d	As2O5	46.10	Click
As	3d	As2O5	46.10	Click
As	3d	GaAsO4	46.10	Click
As	3d	As2O3	46.30	Click
As	3d	As2O5	46.30	Click
As	3d	As2O5	46.50	Click
As	3d	KH2AsO4	46.70	Click
As	3d	(C6H5CHCHC6H4CHCHC6H5)(AsF5)2.9	46.80	Click
As	3d	AsF5	47.10	Click
As	3d	AsF3	47.10	Click
As	3d	KAsF6	47.80	Click
As	3d	KAsF6	47.80	Click
As	3d	KAsF6	48.10	Click
As	3d	(C6H5CHCHC6H4CHCHC6H5)(AsF5)2.9	48.20	Click
As	3d	LiAsF6	49.40	Click

→ Periodic Table

Statistical Analysis of Binding Energies in NIST XPS Database of BEs

end-of-page

Arsenic Spectra – As2O5

Six (6) Chemical State Tables of As (3d_5/2) *BEs***

→ Periodic Table

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Arsenic Spectra – As2O5

Six (6) Chemical State Tables of As (3d5/2) BEs

→ Periodic Table

Six (6) Chemical State Tables of As (3d_5/2) *BEs***