Ino In2O3 In(OH)3 In2S3  In2Se3  In2Te3  InN InP InSb CuInGa CuInGaSe InGaN InGaAs InF3 Basic 

XPS Spectra
Indium (In) Compounds
The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra.
Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.
Peak-fits are guides for practical, real-world applications. Peak-fits are not fully optimized or designed to test any theory.

Indium Phosphide  (InP – single crystal wafer – 111)
Survey, Peak-fits, BEs, FWHMs, and Peak Labels

→  Periodic Table   → Six (6) BE Tables
Survey Spectrum from InP <111>
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag (3d5/2) FWHM = 1.3 eV
→  Periodic Table  → Six (6) BE Tables
In (3d) Spectrum from InP – Raw
Fresh exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.50 eV		 In (3d) Spectrum from InP – Peak-Fit
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.50 eV

→  Periodic Table  → Six (6) BE Tables
In (3d) Spectrum from InP – extended
Fresh exposed bulk, Flood gun is OFF, C (1s) BE = 285.5 eV, Ag FWHM = 0.75 eV		 In (3d) Spectrum from InP – expanded
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.5 eV, Ag FWHM = 0.75 eV
→  Periodic Table  → Six (6) BE Tables
P (2p) Spectrum from InP – Raw
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.50 eV		 P (2p) Spectrum from InP – Peak-Fit
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.50 eV
→  Periodic Table  → Six (6) BE Tables
C (1s) Spectrum from InP – Raw
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.40 eV, Ag FWHM = 0.50 eV		 C (1s) Spectrum from InP – Peak-Fit
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.50 eV
→  Periodic Table  → Six (6) BE Tables
Valence Band Spectrum – InP 
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.5 eV, Ag FWHM = 0.75 eV		 P Auger Spectrum – InP 
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.5 eV, Ag FWHM = 0.75 eV
 
Overlays
→  Periodic Table  → Six (6) BE Tables
Valence Band Spectra – Overlay of Ino and InP 
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.75 eV		 In (3d) Spectra – Overlay of Ino and InP 
Freshly exposed bulk, Flood gun is OFF, C (1s) BE = 285.4 eV, Ag FWHM = 0.75 eV

End-of-spectra

Price to purchase raw data sets:
Raw spectra – VAMAS ASCII format ($6)
Raw spectra – SDP binary format ($5)
SDP v9 – $145 (3 yr license)

 

 

Transmission Function Tests
 

December 2015 – Transmission Function of Thermo K-Alpha Plus
→  Periodic Table 
Survey Spectra of Ion Etched Copper (Cr), PEs = 50, 100, 150 and 200 eV
→  Periodic Table 
March 2016 – Transmission Function of Thermo K-Alpha Plus 
 
Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 150 and 200 eV
→  Periodic Table  
August 2019 – Transmission Function of Thermo K-Alpha Plus
 
Survey Spectra of HOPG (C), PEs = 20, 50, 100 and 200 eV
→  Periodic Table  
January 2022 – Transmission Function of Thermo K-Alpha Plus
Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 120, 140, 160, 180 and 200 eV

End-of-Spectra

 

Six (6) Chemical State Tables of In (3d5/2) BEs

 

  • The XPS Library Spectra-Base
  • PHI Handbook
  • Thermo-Scientific Website
  • XPSfitting Website
  • Techdb Website
  • NIST Website

→  Periodic Table 

 

Notes of Caution when using Published BEs and BE Tables from Insulators and Conductors:

  • Accuracy of Published BEs
    • The accuracy depends on the calibration BEs used to calibrate the energy scale of the instrument.  Cu (3d5) BE can vary from 932.2 to 932.8 eV for old publications 
    • Different authors use different BEs for the C (1s) BE of the hydrocarbons found in adventitious carbon that appears on all materials and samples.  From 284.2 to 285.3 eV
    • The accuracy depends on when the authors last checked or adjusted their energy scale to produce the expected calibration BEs
  • Worldwide Differences in Energy Scale Calibrations
    • For various reasons authors still use older energy scale calibrations 
    • Some authors still adjust their energy scale so Cu (3d5/2) appears at 932.2 eV or 932.8 eV because this is what the maker taught them
    • This range causes BEs in the higher BE end to be larger than expected 
    • This variation increases significantly above 600 eV BE
  • Charge Compensation
    • Samples that behave as true insulators normally require the use of a charge neutralizer (electron flood gun with or without Ar+ ions) so that the measured chemical state spectra can be produced without peak-shape distortions or sloping tails on the low BE side of the peak envelop. 
    • Floating all samples (conductive, semi-conductive, and non-conductive) and always using the electron flood gun is considered to produce more reliable BEs and is recommended.
  • Charge Referencing Methods for Insulators
    • Charge referencing is a common method, but it can produce results that are less reliable.
    • When an electron flood gun is used, the BE scale will usually shift to lower BE values by 0.01 to 5.0 eV depending on your voltage setting. Normally, to correct for this flood gun induced shift, the BE of the hydrocarbon C (1s) peak maximum from adventitious carbon is used to correct for the charge induced shift.
    • The hydrocarbon peak is normally the largest peak at the lowest BE. 
    • Depending on your preference or training, the C (1s) BE assigned to this hydrocarbon peak varies from 284.8 to 285.0 eV.  Other BEs can be as low as 284.2 eV or as high as 285.3 eV
    • Native oxides that still show the pure metal can suffer differential charging that causes the C (1s) and the O (1s) and the Metal Oxide BE to be larger
    • When using the electron flood gun, the instrument operator should adjust the voltage and the XY position of the electron flood gun to produce peaks from a strong XPS signal (eg O (1s) or C (1s) having the most narrow FWHM and the lowest experimentally measured BE. 

→  Periodic Table 

Table #1

In (3d5/2) Chemical State BEs from:  “The XPS Library Spectra-Base”

C (1s) BE = 285.0 eV for TXL BEs
and C (1s) BE = 284.8 eV for NIST BEs

Element Atomic # Compound As-Measured by TXL or NIST Average BE Largest BE Hydrocarbon C (1s) BE  Source
In 49 In – element 443.8 eV 285.0 eV The XPS Library
In 49 InP (N*6) 443.9 eV 444.6 eV 284.8 eV Avg BE – NIST
In 49 CuInSe2 (N*2) 444.1 eV 444.7 eV 284.8 eV Avg BE – NIST
In 49 InSb (N*2) 444.1 eV 444.3 eV 284.8 eV Avg BE – NIST
In 49 In2O3 (N*11) 444.3 eV 445.0 eV 284.8 eV Avg BE – NIST
In 49 In-P 444.3 eV 444.8 eV 285.0 eV The XPS Library
In 49 InSb 444.3 eV 444.6 eV 285.0 eV The XPS Library
In 49 GaInAs 444.4 eV 444.9 eV 285.0 eV The XPS Library
In 49 In2Se3 (N*3) 444.5 eV 445.1 eV 284.8 eV Avg BE – NIST
In 49 In2Te3 (N*1) 444.5 eV 284.8 eV Avg BE – NIST
In 49 In-N 444.5 eV 285.0 eV The XPS Library
In 49 AuInOx (N*5) 444.6 eV 445.1 eV 284.8 eV Avg BE – NIST
In 49 In2Se3 444.6 eV 444.9 eV 285.0 eV The XPS Library
In 49 In2S3 (N*2) 444.7 eV 444.9 eV 284.8 eV Avg BE – NIST
In 49 In-(OH)3 (N*2) 445.0 eV 445.2 eV 284.8 eV Avg BE – NIST
In 49 InI3 (N*3) 445.0 eV 446.1 eV 284.8 eV Avg BE – NIST
In 49 InSnO 445.0 eV 285.0 eV The XPS Library
In 49 In-2O3 445.1 eV 285.0 eV The XPS Library
In 49 In-Ox ntv (N*1) 445.1 eV 284.8 eV Avg BE – NIST
In 49 InPO4 (N*2) 445.5 eV 445.7 eV 284.8 eV Avg BE – NIST
In 49 InBr3 (N*3) 445.7 eV 446.6 eV 284.8 eV Avg BE – NIST
In 49 In-Cl3 (N*3) 445.9 eV 446.9 eV 284.8 eV Avg BE – NIST
In 49 In-F3 (N*2) 446.2 eV 446.5 eV 284.8 eV Avg BE – NIST

 

Charge Referencing Notes

  • (N*number) identifies the number of NIST BEs that were averaged to produce the BE in the middle column.
  • The XPS Library uses Binding Energy Scale Calibration with Cu (2p3/2) BE = 932.62 eV and Au (4f7/2) BE = 83.98 eV.  BE (eV) Uncertainty Range:  +/- 0.2 eV
  • Charge Referencing of insulators is defined such that the Adventitious Hydrocarbon C (1s) BE (eV) = 285.0 eV.  NIST uses C (1s) BE = 284.8 eV 
  • Note:   Ion etching removes adventitious carbon, implants Ar (+), changes conductivity of surface, and degrades chemistry of various chemical states.
  • Note:  Ion Etching changes BE of C (1s) hydrocarbon peak.
  • TXL – abbreviation for: “The XPS Library” (https://xpslibrary.com).  NIST:  National Institute for Science and Technology (in USA)

→  Periodic Table 

Table #2

In (3d5/2) Chemical State BEs from:  “PHI Handbook”

C (1s) BE = 284.8 eV

→  Periodic Table 

Copyright ©:  Ulvac-PHI

Table #3

In (3d5/2) Chemical State BEs from:  “Thermo-Scientific” Website

C (1s) BE = 284.8 eV

Chemical state Binding energy (eV), In (3d5/2)
In metal 443.8
In2O3 444.0

→  Periodic Table 

Copyright ©:  Thermo Scientific 

Table #4

In (3d5/2) Chemical State BEs from:  “XPSfitting” Website

Chemical State BE Table derived by Averaging BEs in the NIST XPS database of BEs
C (1s) BE = 284.8 eV

→  Periodic Table 

Copyright ©:  Mark Beisinger

Table #5

In (3d5/2) Chemical State BEs from:  “Techdb.podzone.net” Website

 

XPS Spectra – Chemical Shift | Binding Energy
C (1s) BE = 284.6 eV

XPS(X線光電子分光法)スペクトル 化学状態 化学シフト ケミカルシフト

Element Level Compound B.E.(eV) min max
In 3d5/2 In 443.8 ±0.3 443.5 ～ 444.0
In 3d5/2 InSb 444.1 ±0.3 443.8 ～ 444.3
In 3d5/2 In2Te3 444.6 ±0.3 444.3 ～ 444.8
In 3d5/2 InP 444.6 ±0.3 444.3 ～ 444.9
In 3d5/2 In2O3 444.6 ±0.3 444.3 ～ 444.9
In 3d5/2 InCl 444.9 ±0.3 444.6 ～ 445.2
In 3d5/2 In(OH)3 445.0 ±0.3 444.7 ～ 445.3
In 3d5/2 In(acac)3 445.5 ±0.3 445.2 ～ 445.7
In 3d5/2 Br2InEt4N 445.7 ±0.3 445.4 ～ 446.0
In 3d5/2 Br4InPr4N 446.0 ±0.3 445.7 ～ 446.3
In 3d5/2 InCl3 446.5 ±0.5 446.0 ～ 446.9

 

→  Periodic Table 

 


Histograms of NIST BEs for In (3d5/2) BEs

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Histogram indicates:  443.8 eV for Ino based on 18 literature BEs Histogram indicates:  444.8 eV for In2O3 based on 12 literature BEs

Histogram indicates:  128.7 eV for P (2p3/2) in InP based on 14 literature BEs

Table #6


NIST Database of In (3d5/2) Binding Energies

NIST Standard Reference Database 20, Version 4.1

Data compiled and evaluated
by
Alexander V. Naumkin, Anna Kraut-Vass, Stephen W. Gaarenstroom, and Cedric J. Powell
©2012 copyright by the U.S. Secretary of Commerce on behalf of the United States of America. All rights reserved.

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

 

Element Spectral Line Formula Energy (eV) Reference
In 3d5/2 In 443.15  Click
In 3d5/2 In 443.15  Click
In 3d5/2 In 443.30  Click
In 3d5/2 In 443.30  Click
In 3d5/2 In 443.40  Click
In 3d5/2 In 443.40  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.60  Click
In 3d5/2 In 443.70  Click
In 3d5/2 In 443.70  Click
In 3d5/2 In 443.75  Click
In 3d5/2 In 443.75  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.80  Click
In 3d5/2 In 443.84  Click
In 3d5/2 In 443.84  Click
In 3d5/2 In 443.84  Click
In 3d5/2 In 443.84  Click
In 3d5/2 In 443.86  Click
In 3d5/2 In 443.86  Click
In 3d5/2 InI 443.90  Click
In 3d5/2 InP 443.90  Click
In 3d5/2 PbInTe 443.90  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 In 444.00  Click
In 3d5/2 InP 444.00  Click
In 3d5/2 H2/InP 444.00  Click
In 3d5/2 H2/(In,Ga)As 444.00  Click
In 3d5/2 AuIn2 444.03  Click
In 3d5/2 AuIn2 444.03  Click
In 3d5/2 AuIn 444.06  Click
In 3d5/2 AuIn 444.06  Click
In 3d5/2 CuInSe2 444.10  Click
In 3d5/2 InSb 444.10  Click
In 3d5/2 (In,Ga)AsOx 444.10  Click
In 3d5/2 Ar/(In,Ga)As 444.10  Click
In 3d5/2 N2O/(In,Ga)As 444.10  Click
In 3d5/2 InTe 444.10  Click
In 3d5/2 AuIn0.111 444.15  Click
In 3d5/2 AuIn0.111 444.15  Click
In 3d5/2 Au3In 444.18  Click
In 3d5/2 Au3In 444.18  Click
In 3d5/2 NH3/(In,Ga)As 444.20  Click
In 3d5/2 N2/(In,Ga)As 444.20  Click
In 3d5/2 (In2O3)0.90(SnO2)0.10 444.20  Click
In 3d5/2 Ga0.47In0.53As 444.22  Click
In 3d5/2 InAs 444.25  Click
In 3d5/2 In 444.30  Click
In 3d5/2 In 444.30  Click
In 3d5/2 InSb 444.30  Click
In 3d5/2 In2O3 444.30  Click
In 3d5/2 In2O3 444.30  Click
In 3d5/2 In2O3 444.30  Click
In 3d5/2 InPOx 444.30  Click
In 3d5/2 Ar/InP 444.30  Click
In 3d5/2 InAl6.5P0.4O13 444.30  Click
In 3d5/2 N2O/InP 444.30  Click
In 3d5/2 InAs 444.30  Click
In 3d5/2 In2O3 444.30  Click
In 3d5/2 As15In54Sb31 444.30  Click
In 3d5/2 InAs 444.31  Click
In 3d5/2 In2O3 444.40  Click
In 3d5/2 InP 444.40  Click
In 3d5/2 InMo6S8 444.40  Click
In 3d5/2 NH3/InP 444.40  Click
In 3d5/2 N2/InP 444.40  Click
In 3d5/2 InP0.5O2.8 444.40  Click
In 3d5/2 InP0.23O2.6 444.40  Click
In 3d5/2 Cu24.6In24.8Se50.6/SiO2 444.40  Click
In 3d5/2 In2Te3 444.40  Click
In 3d5/2 InSb 444.43  Click
In 3d5/2 In2Te3 444.50  Click
In 3d5/2 InP 444.50  Click
In 3d5/2 In2Se3 444.50  Click
In 3d5/2 (In2O3)0.95(SnO2)0.05 444.50  Click
In 3d5/2 In2O3 444.50  Click
In 3d5/2 In 444.60  Click
In 3d5/2 In 444.60  Click
In 3d5/2 In2O3 444.60  Click
In 3d5/2 InP 444.60  Click
In 3d5/2 InP 444.60  Click
In 3d5/2 AuInOx 444.60  Click
In 3d5/2 Cu24.3In25.8Se49.9/SiO2 444.60  Click
In 3d5/2 CuInS2 444.60  Click
In 3d5/2 InSbOx 444.60  Click
In 3d5/2 InSb 444.60  Click
In 3d5/2 InP 444.66  Click
In 3d5/2 CuInSe2 444.70  Click
In 3d5/2 In2O3 444.70  Click
In 3d5/2 In2O3 444.70  Click
In 3d5/2 In2S3 444.70  Click
In 3d5/2 InP 444.79  Click
In 3d5/2 In2Se3 444.80  Click
In 3d5/2 Cu29.1In22.4Se48.5/SiO2 444.80  Click
In 3d5/2 AuInOx 444.80  Click
In 3d5/2 AuInOx 444.80  Click
In 3d5/2 Cu25.6In24.4Se50/SiO2 444.80  Click
In 3d5/2 CuInSe2 444.80  Click
In 3d5/2 CuInSe2 444.80  Click
In 3d5/2 Cu24.6In24.8Se50.6Nx 444.80  Click
In 3d5/2 CuInS2 444.80  Click
In 3d5/2 CuInS2 444.80  Click
In 3d5/2 In40Se60 444.80  Click
In 3d5/2 InCl 444.90  Click
In 3d5/2 In2O3 444.90  Click
In 3d5/2 In2S3 444.90  Click
In 3d5/2 CdCr0.3In1.7S4 444.90  Click
In 3d5/2 CdCr0.3In1.7S4 444.90  Click
In 3d5/2 InAsO4 444.90  Click
In 3d5/2 CuInSSe 444.90  Click
In 3d5/2 In(OH)3 445.00  Click
In 3d5/2 InI3 445.00  Click
In 3d5/2 In2O3 445.00  Click
In 3d5/2 In2O3 445.00  Click
In 3d5/2 H2/(In,Ga)As 445.00  Click
In 3d5/2 AuInOx 445.00  Click
In 3d5/2 In2S3 445.06  Click
In 3d5/2 InOx 445.10  Click
In 3d5/2 InBr 445.10  Click
In 3d5/2 InCl 445.10  Click
In 3d5/2 In2O3 445.10  Click
In 3d5/2 In2Se3 445.10  Click
In 3d5/2 In(OH)3.nH20 445.10  Click
In 3d5/2 Co0.46Zn0.54In2.02S3.90 445.10  Click
In 3d5/2 N2/(In,Ga)As 445.10  Click
In 3d5/2 H2/InP 445.10  Click
In 3d5/2 AuInOx 445.10  Click
In 3d5/2 InPO4 445.10  Click
In 3d5/2 [N(C2H5)4][InCl2] 445.20  Click
In 3d5/2 In(OH)3 445.20  Click
In 3d5/2 NH3/(In,Ga)As 445.20  Click
In 3d5/2 [Mo3InS4(SO3C6H4CH3)2(H2O)10](SO3C6H4CH3)3.13H2O 445.20  Click
In 3d5/2 [N(CH3)4]2[InCl5] 445.30  Click
In 3d5/2 N2/InP 445.30  Click
In 3d5/2 N2O/(In,Ga)As 445.30  Click
In 3d5/2 In2O3 445.30  Click
In 3d5/2 [N(C3H7)4][InI4] 445.40  Click
In 3d5/2 [In(CH3C(O)CHC(O)CH3)3] 445.40  Click
In 3d5/2 NH3/InP 445.40  Click
In 3d5/2 Ar/(In,Ga)As 445.40  Click
In 3d5/2 CdIn2S2Se2 445.40  Click
In 3d5/2 InPO4.nH20 445.50  Click
In 3d5/2 Ar/InP 445.50  Click
In 3d5/2 N2O/InP 445.50  Click
In 3d5/2 Co0.07Zn0.93In2.10S4.02 445.50  Click
In 3d5/2 CuInS2 445.50  Click
In 3d5/2 (NH4)3[InF6] 445.60  Click
In 3d5/2 CoIn2S4 445.60  Click
In 3d5/2 CoIn2S4 445.60  Click
In 3d5/2 ZnIn2.02S3.95 445.60  Click
In 3d5/2 In2S3 445.60  Click
In 3d5/2 CoGaIn2S4 445.60  Click
In 3d5/2 [NH(CH3)3]3[InCl6] 445.70  Click
In 3d5/2 [N(C2H5)4][InBr2] 445.70  Click
In 3d5/2 [N(C2H5)4][InCl2]Cl2 445.70  Click
In 3d5/2 InBr3 445.70  Click
In 3d5/2 [N(CH3)4][InBr4] 445.70  Click
In 3d5/2 InPO4 445.70  Click
In 3d5/2 In(PO3)3 445.70  Click
In 3d5/2 [N(C3H7)4][InCl4] 445.80  Click
In 3d5/2 InI3 445.80  Click
In 3d5/2 InP 445.80  Click
In 3d5/2 Co0.35Zn0.65In2.06S3.72 445.80  Click
In 3d5/2 [N(C3H7)4][InBr4] 445.90  Click
In 3d5/2 InCl3 445.90  Click
In 3d5/2 [N(CH3)4]2[InBr5] 446.00  Click
In 3d5/2 InBr3 446.00  Click
In 3d5/2 InCl3 446.00  Click
In 3d5/2 In(PO3)4 446.00  Click
In 3d5/2 InI3 446.10  Click
In 3d5/2 InF3 446.20  Click
In 3d5/2 [NH3(CH3)]4[InCl7] 446.20  Click
In 3d5/2 InF3 446.50  Click
In 3d5/2 InCl3 446.50  Click
In 3d5/2 InBr3 446.60  Click
In 3d5/2 Cu23.4In26.5Se50.1/SiO2 446.60  Click
In 3d5/2 In2O3 446.70  Click
In 3d5/2 InCl3 446.90  Click
In 3d5/2 C32H16N8Zn:C32H16ClInN8(3:1) 450.50  Click
In 3d5/2 C32H16ClInN8 451.70  Click

 

 

Statistical Analysis of Binding Energies in NIST XPS Database of BEs

 

 

→  Periodic Table