Si^o	n-Si^o	p-Si^o	SiC	SiO	SiO₂	SiO₂-nH₂O	Si₃N₄	SiGe_x	SiON
Al₂SiO₅	Al₂Si₂O₁₃	Be₂SiO₄	CaTiSiO₅	K₂SiO₃	MgSiO₃	Mg₃Si₄O₁₀(OH)₂	Na₂Si₃O₇	ZrSiO₄	Silicic Acid
PDMS	PMPS	Soda-lime Glass	NIST 610	NIST 612	NIST 614	Ba-Borosilicate	Silica Gel	Colloidal SiO₂

XPS Spectra
Silicon (Si) Compounds
The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra.
Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.
Peak-fits are guides for practical, real-world applications. Peak-fits are not fully optimized or designed to test any theory.

Silicon p-type (Si^op-Si, single crystal, <111>, thin native oxide)
Survey, Peak-fits, BEs, FWHMs, and Peak Labels

→ Periodic Table	→ Six (6) BE Tables
Survey Spectrum from Si^o p-type, thin native oxide Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag (3d_5/2) FWHM = 1.3 eV


→ Periodic Table	→ Six (6) BE Tables
Si (2p) Spectrum from Si^o p-type, thin native oxide – Raw Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	Si (2p) Spectrum from Si^o p-type, thin native oxide – Peak-Fit Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV



Si (2p-2s) Spectrum from Si^o p-type, thin native oxide – Extended Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	Si (2p-2s) Spectrum from Si^o p-type, thin native oxide – Expanded Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
Si (2s) Spectrum from Si^o p-type, thin native oxide – Raw Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	Si (2s) Spectrum from Si^o p-type, thin native oxide – Peak-Fit Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
O (1s) Spectrum from Si^o p-type, thin native oxide – Extended Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	O (1s) Spectrum from Si^o p-type, thin native oxide – Expanded Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV


→ Periodic Table	→ Six (6) BE Tables
C (1s) Spectrum from Si^o p-type, thin native oxide – As measured Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	C (1s) Spectrum from Si^o p-type, thin native oxide – Peak-Fit Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV

→ Periodic Table	→ Six (6) BE Tables
O (KLL) Auger Spectrum from Si^o p-type, thin native oxide – Raw Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	Valence Band Signals from Si^o p-type, thin native oxide – Raw Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV
na



Overlays
→ Periodic Table	→ Six (6) BE Tables
Valence Band Spectra – Overlay of Si^o p-type and Si^o n-type Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV	Si (2p) Spectra – Overlay of Si^o p-type and Si^o n-type Native oxide, Flood gun is OFF, C (1s) BE = 285.43 eV, Ag FWHM = 0.75 eV



End-of-spectra Price to purchase raw data sets: Raw spectra – VAMAS ASCII format ($6) Raw spectra – SDP binary format ($5) SDP v9 – $145 (3 yr license) Transmission Function Tests

December 2015 – Transmission Function of Thermo K-Alpha Plus

→ Periodic Table

Survey Spectra of Ion Etched Copper (Cr), PEs = 50, 100, 150 and 200 eV

→ Periodic Table

March 2016 – Transmission Function of Thermo K-Alpha Plus

Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 150 and 200 eV

→ Periodic Table

August 2019 – Transmission Function of Thermo K-Alpha Plus

Survey Spectra of HOPG (C), PEs = 20, 50, 100 and 200 eV

→ Periodic Table

January 2022 – Transmission Function of Thermo K-Alpha Plus

Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 120, 140, 160, 180 and 200 eV

Six (6) Chemical State Tables of Si (2p) BEs

The XPS Library Spectra-Base
PHI Handbook
Thermo-Scientific Website
XPSfitting Website
Techdb Website
NIST Website

Notes of Caution when using Published BEs and BE Tables from Insulators and Conductors:

- Accuracy of Published BEs
  - The accuracy depends on the calibration BEs used to calibrate the energy scale of the instrument. Cu (2p_3/2) BE can vary from 932.2 to 932.8 eV for old publications
  - Different authors use different BEs for the C (1s) BE of the hydrocarbons found in adventitious carbon that appears on all materials and samples. From 284.2 to 285.3 eV
  - The accuracy depends on when the authors last checked or adjusted their energy scale to produce the expected calibration BEs
- There are uncertainties and error ranges in nearly all BEs
  - Flood guns
- Worldwide Differences in Energy Scale Calibrations
  - For various reasons authors still use older energy scale calibrations
  - Some authors still adjust their energy scale so Cu (2p_3/2) appears at 932.2 eV or 932.8 eV because this is what the maker taught them
  - This range causes BEs in the higher BE end to be larger than expected
  - This variation increases significantly above 600 eV BE
- Charge Compensation
  - Samples that behave as true insulators normally require the use of a charge neutralizer (electron flood gun with or without Ar+ ions) so that the measured chemical state spectra can be produced without peak-shape distortions or sloping tails on the low BE side of the peak envelop.
  - Floating all samples (conductive, semi-conductive, and non-conductive) and always using the electron flood gun is considered to produce more reliable BEs and is recommended.
- Charge Referencing Methods for Insulators
  - Charge referencing is a common method, but it can produce results that are less reliable.
  - When an electron flood gun is used, the BE scale will usually shift to lower BE values by 0.01 to 5.0 eV depending on your voltage setting. Normally, to correct for this flood gun induced shift, the BE of the hydrocarbon C (1s) peak maximum from adventitious carbon is used to correct for the charge induced shift.
  - The hydrocarbon peak is normally the largest peak at the lowest BE.
  - Depending on your preference or training, the C (1s) BE assigned to this hydrocarbon peak varies from 284.8 to 285.0 eV. Other BEs can be as low as 284.2 eV or as high as 285.3 eV
  - Native oxides that still show the pure metal can suffer differential charging that causes the C (1s) and the O (1s) and the Metal Oxide BE to be larger
  - When using the electron flood gun, the instrument operator should adjust the voltage and the XY position of the electron flood gun to produce peaks from a strong XPS signal (eg O (1s) or C (1s) having the most narrow FWHM and the lowest experimentally measured BE.

→ Periodic Table

Table #1

Si (2p) Chemical State BEs from: “The XPS Library Spectra-Base”

C (1s) BE = 285.0 eV for TXL BEs
and C (1s) BE = 284.8 eV for NIST BEs

Element	Atomic #	Compound	As-Measured by TXL or NIST Average BE	Largest BE	Hydrocarbon C (1s) BE	Source
Si	14	Mg2Si	98.5 eV		285.0 eV	The XPS Library
Si	14	NiSi (N*6)	98.8 eV	99.7 eV	284.8 eV	Avg BE – NIST
Si	14	MoSi2	99.0 eV		285.0 eV	The XPS Library
Si	14	Si3H2 (N*4)	99.0 eV		284.8 eV	Avg BE – NIST
Si	14	Si (p)	99.2 eV		285.0 eV	The XPS Library
Si	14	Si – element	99.5 eV		285.0 eV	The XPS Library
Si	14	Si (n)	99.8 eV		285.0 eV	The XPS Library
Si	14	SiC (N*5)	100.4 eV	100.7 eV	284.8 eV	Avg BE – NIST
Si	14	SiC	100.5 eV		285.0 eV	The XPS Library
Si	14	Si2O	100.8 eV		285.0 eV	The XPS Library
Si	14	Si3N4 (N*12)	101.5 eV	102.1 eV	284.8 eV	Avg BE – NIST
Si	14	Si-O	101.5 eV		285.0 eV	The XPS Library
Si	14	Si3N4	101.7 eV		285.0 eV	The XPS Library
Si	14	SiCN	101.8 eV		285.0 eV	The XPS Library
Si	14	B4Si (N*1)	101.9 eV		284.8 eV	Avg BE – NIST
Si	14	Pyrope	102.1 eV		285.0 eV	The XPS Library
Si	14	HfSiOx	102.3 eV		285.0 eV	The XPS Library
Si	14	Si2O3	102.3 eV		285.0 eV	The XPS Library
Si	14	Mica	102.4 eV		285.0 eV	The XPS Library
Si	14	M-SiO3 (N*2)	102.4 eV	103.3 eV	284.8 eV	Avg BE – NIST
Si	14	Si-PDMS	102.4 eV	102.6 eV	285.0 eV	The XPS Library
Si	14	Al2SiO5	102.8 eV		285.0 eV	The XPS Library
Si	14	Aluminosilicates	102.8 eV		285.0 eV	The XPS Library
Si	14	SiON	102.8 eV	103.0 eV	285.0 eV	The XPS Library
Si	14	LiAlSi2O6	103.0 eV		285.0 eV	The XPS Library
Si	14	SiO2	103.1 eV		285.0 eV	The XPS Library
Si	14	SiO2 thermal	103.2 eV		285.0 eV	The XPS Library
Si	14	SiO2 fused	103.4 eV		285.0 eV	The XPS Library
Si	14	Si-(OH)4 Opal	103.7 eV		285.0 eV	The XPS Library

Charge Referencing

(N*number) identifies the number of NIST BEs that were averaged to produce the BE in the middle column.
Binding Energy Scale Calibration expects Cu (2p_3/2) BE = 932.62 eV and Au (4f_7/2) BE = 83.98 eV. BE (eV) Uncertainty Range: +/- 0.2 eV
Charge Referencing of insulators is defined such that the Adventitious Hydrocarbon C (1s) BE (eV) = 285.0 eV. NIST uses C (1s) BE = 284.8 eV
Note: Ion etching removes adventitious carbon, implants Ar (+), changes conductivity of surface, and degrades chemistry of various chemical states.
Note: Ion Etching changes BE of C (1s) hydrocarbon peak.
TXL – abbreviation for: “The XPS Library” (https://xpslibrary.com). NIST: National Institute for Science and Technology (in USA)

→ Periodic Table

Table #2

Si (2p) Chemical State BEs from: “PHI Handbook”

C (1s) BE = 284.8 eV

→ Periodic Table

Table #3

Si (2p) Chemical State BEs from: “Thermo-Scientific” Website

C (1s) BE = 284.8 eV

Chemical state	Binding energy Si (2p) / eV
Si element	99.4
Si3N4	101.7
ZrSiO4	102
Organic Si	~102
Aluminosilicate	102.7
SiO2	103.5

→ Periodic Table

Table #4

Si (2p) Chemical State BEs from: “XPSfitting” Website

Chemical State BE Table derived by Averaging BEs in the NIST XPS database of BEs
C (1s) BE = 284.8 eV

→ Periodic Table

Table #5

Si (2p) Chemical State BEs from: “Techdb.podzone.net” Website

XPS Spectra – Chemical Shift | Binding Energy
C (1s) BE = 284.6 eV

XPS(X線光電子分光法)スペクトル化学状態化学シフトケミカルシフト

Element	Level	Compound	B.E.(eV)		min		max
Si	2p	Silicon	99.2	±0.4	98.8	～	99.5
Si	2p	Silicides	99.7	±0.3	99.4	～	99.9
Si	2p	Carbides	100.4	±0.5	99.9	～	100.9
Si	2p	Nitrides	101.9	±0.4	101.5	～	102.2
Si	2p	Silicones (Silanes)	102.4	±0.5	101.9	～	102.9
Si	2p	Silicates	102.5	±0.5	102.0	～	103.0
Si	2p	Silica	103.6	±0.4	103.2	～	103.9

→ Periodic Table

Histograms of NIST BEs for Si (2p) BEs

Important Note: NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Histogram indicates: 99.4 eV for Si^o based on 37 literature BEs Doping type is Unknown n-Si can be 0.6 eV smaller than p-Si	Histogram indicates: 103.5 eV for SiO₂ based on 54 literature BEs

Histogram indicates: 101.9 eV for Si₃N₄ based on 15 literature BEs	Histogram indicates: 99.2 eV for SiHx based on 16 literature BEs

Histogram indicates: 102.5 eV for -((CH₃)₂SiO)_n– based on 7 literature BEs PDMS = Silicone Oil = Poly-dimethylsiloxane	Histogram indicates: 100.6 eV for SiC based on 11 literature BEs

Table #6

NIST Database of Si (2p) Binding Energies

NIST Standard Reference Database 20, Version 4.1

Data compiled and evaluated
by
Alexander V. Naumkin, Anna Kraut-Vass, Stephen W. Gaarenstroom, and Cedric J. Powell
©2012 copyright by the U.S. Secretary of Commerce on behalf of the United States of America. All rights reserved.

Important Note: NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Element	Spectral Line	Formula	Energy (eV)	Reference
Si	2p	Tm/Si	98.00	Click
Si	2p	Tm/Si	98.00	Click
Si	2p	Gd5Si3	98.10	Click
Si	2p	Si	98.40	Click
Si	2p	Si/Ba	98.40	Click
Si	2p	FeSi	98.60	Click
Si	2p	GdSi	98.60	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)7C(O)OH/Si	98.60	Click
Si	2p	Si	98.70	Click
Si	2p	Er/Si	98.70	Click
Si	2p	SiO2/Si	98.70	Click
Si	2p	Tm/Si	98.70	Click
Si	2p	Tm/Si	98.70	Click
Si	2p	Tm/Si	98.70	Click
Si	2p	TiSi2	98.80	Click
Si	2p	SiO2/Si	98.80	Click
Si	2p	SiO2/Si	98.80	Click
Si	2p	Au34Si66	98.80	Click
Si	2p	Si/(CH3(CH2)16C(O)O)2Cd	98.80	Click
Si	2p	Si/AlAs	98.89	Click
Si	2p	Si	98.90	Click
Si	2p	Si	98.90	Click
Si	2p	FeSi2	98.90	Click
Si	2p	Er/Si	98.90	Click
Si	2p	Er/Si	98.90	Click
Si	2p	SiO2/Si	98.90	Click
Si	2p	Au59Si41	98.90	Click
Si	2p	Si/Y	98.90	Click
Si	2p	Gd3Si5	98.90	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)16CH3/Si	98.90	Click
Si	2p	Si/(-O)3Si(CH2)3NHC(O)(CH2)11NO2	98.90	Click
Si	2p	Si:H	98.90	Click
Si	2p	Si/SiO2/Zr	98.90	Click
Si	2p	Zr1.02Si0.96Te1.02	98.90	Click
Si	2p	Si/Pt	98.97	Click
Si	2p	Si/Pt	98.97	Click
Si	2p	Si	99.00	Click
Si	2p	FeSi	99.00	Click
Si	2p	Tm/Si	99.00	Click
Si	2p	Tm/Si	99.00	Click
Si	2p	Tm/Si	99.00	Click
Si	2p	Si/(-O)3Si(CH2)3NHC(O)(CH2)11NH2	99.00	Click
Si	2p	Si/(-O)3Si(CH2)3NHC(O)(CH2)7C(O)OCH3	99.00	Click
Si	2p	Si/O2	99.00	Click
Si	2p	Si/Ir	99.02	Click
Si	2p	Si/Ir	99.07	Click
Si	2p	Si	99.10	Click
Si	2p	Si	99.10	Click
Si	2p	SiO2/Si	99.10	Click
Si	2p	Au45Si55	99.10	Click
Si	2p	SiOx/Si	99.10	Click
Si	2p	Si/SiO2/Zr	99.10	Click
Si	2p	Si	99.20	Click
Si	2p	Si	99.20	Click
Si	2p	FeSi2	99.20	Click
Si	2p	Si/Y	99.20	Click
Si	2p	SiF4/Si	99.20	Click
Si	2p	SiF4/Si	99.20	Click
Si	2p	Si	99.22	Click
Si	2p	Ag/SiHx	99.23	Click
Si	2p	CoSi2/Si	99.27	Click
Si	2p	Si	99.30	Click
Si	2p	Si	99.30	Click
Si	2p	Si	99.30	Click
Si	2p	Si	99.30	Click
Si	2p	FeSi2	99.30	Click
Si	2p	Er/Si	99.30	Click
Si	2p	Er/Si	99.30	Click
Si	2p	SiOx/Si	99.30	Click
Si	2p	SiOx/Si	99.30	Click
Si	2p	Ta2O5/Si	99.30	Click
Si	2p	Ta2O5/Si	99.30	Click
Si	2p	Ta2O5/Si	99.30	Click
Si	2p	Si/SiO2	99.30	Click
Si	2p	SiOx/Si	99.34	Click
Si	2p	Ag/SiHx	99.35	Click
Si	2p	SiO2/Si	99.37	Click
Si	2p	SiOx/Si	99.40	Click
Si	2p	Si	99.40	Click
Si	2p	Si	99.40	Click
Si	2p	MoSi2.2	99.40	Click
Si	2p	Y2O3/SiO2/Si	99.40	Click
Si	2p	Y/SiO2/Si	99.40	Click
Si	2p	(ZrO2)91(Y2O3)9/Si	99.40	Click
Si	2p	(ZrO2)91(Y2O3)9/Si	99.40	Click
Si	2p	Si/SiO2	99.40	Click
Si	2p	Si	99.42	Click
Si	2p	Si/Ba	99.45	Click
Si	2p	Si/GaAs	99.49	Click
Si	2p	SiOx	99.50	Click
Si	2p	O2/Si	99.50	Click
Si	2p	SiO2/Si	99.50	Click
Si	2p	SiHx	99.50	Click
Si	2p	SiHx	99.50	Click
Si	2p	Si/Y	99.50	Click
Si	2p	SiOx/Si	99.50	Click
Si	2p	Si/GaAs	99.50	Click
Si	2p	Pd/Si	99.50	Click
Si	2p	Si/Ir	99.52	Click
Si	2p	Si/GaAs	99.52	Click
Si	2p	Si/GaAs	99.53	Click
Si	2p	Si/Ba	99.55	Click
Si	2p	Si/GaAs	99.55	Click
Si	2p	Si/GaAs	99.55	Click
Si	2p	Si/GaAs	99.57	Click
Si	2p	Si	99.59	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	Si	99.60	Click
Si	2p	SiH0.1	99.60	Click
Si	2p	Si/GaAs	99.60	Click
Si	2p	Si	99.61	Click
Si	2p	Si/Ir	99.62	Click
Si	2p	SiH0.2	99.65	Click
Si	2p	Si	99.67	Click
Si	2p	FeSi2	99.70	Click
Si	2p	Pt/Si	99.72	Click
Si	2p	Si	99.80	Click
Si	2p	Te/Si	99.80	Click
Si	2p	Te/Si	99.80	Click
Si	2p	SiO1.4	99.80	Click
Si	2p	SiO0.4	99.80	Click
Si	2p	Si/GaAs	99.81	Click
Si	2p	SiC	99.85	Click
Si	2p	Si/GaAs	99.87	Click
Si	2p	SiO2/Si	99.92	Click
Si	2p	Si/GaAs	99.92	Click
Si	2p	Si/GaAs	99.95	Click
Si	2p	Si/GaAs	99.96	Click
Si	2p	Si/GaAs	99.99	Click
Si	2p	SiC1.5	100.00	Click
Si	2p	Si/GaAs	100.08	Click
Si	2p	SiC	100.10	Click
Si	2p	SiC1.3	100.10	Click
Si	2p	SiC	100.20	Click
Si	2p	SiC	100.20	Click
Si	2p	SiC1.9	100.20	Click
Si	2p	SiC2.3	100.20	Click
Si	2p	Pt/Si	100.22	Click
Si	2p	SiC	100.30	Click
Si	2p	SiC1.7	100.30	Click
Si	2p	SiC	100.40	Click
Si	2p	SiC	100.40	Click
Si	2p	SiC	100.40	Click
Si	2p	SiOx	100.40	Click
Si	2p	O2/Si	100.40	Click
Si	2p	Pd2Si	100.50	Click
Si	2p	(-(CH3)x(SiHy)-)n	100.50	Click
Si	2p	SiC	100.60	Click
Si	2p	SiC	100.60	Click
Si	2p	Si3N4	100.60	Click
Si	2p	SiC	100.70	Click
Si	2p	Pd[C&=CSi(CH3)3]2(P(C6H5)3)2	100.70	Click
Si	2p	SiC	100.80	Click
Si	2p	SiC	100.80	Click
Si	2p	SiOx	101.10	Click
Si	2p	O2/Si	101.10	Click
Si	2p	(-CH2CH(Si(OCH3)3)-)n	101.10	Click
Si	2p	(-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n	101.10	Click
Si	2p	(-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n	101.10	Click
Si	2p	(-CH2CH(Si(CH3)3)-)n	101.20	Click
Si	2p	CaF2/Si	101.30	Click
Si	2p	CaF2/Si	101.30	Click
Si	2p	CaF2/Si	101.30	Click
Si	2p	(SiO2)0.517(Na2O)0.299(Fe2O3)0.18	101.30	Click
Si	2p	(-Si(OCH3)2O-)xAly	101.40	Click
Si	2p	Si3N4	101.50	Click
Si	2p	(PbF2)9.0(PbO)63.7(SiO2)27.3	101.50	Click
Si	2p	(PbF2)17.2PbO)54.3(SiO2)28.5	101.50	Click
Si	2p	(SiO2)0.563(Na2O)0.304(Fe2O3)0.13	101.50	Click
Si	2p	(PbF2)12.7(PbO)58.2(SiO2)29.1	101.60	Click
Si	2p	(PbF2)3.2(PbO)68.7(SiO2)28.1	101.60	Click
Si	2p	AlN7OSi5	101.60	Click
Si	2p	Na12[Al12Si12O48].18H2O	101.60	Click
Si	2p	(SiO2)0.618(Na2O)0.298(Fe2O3)0.085	101.60	Click
Si	2p	(-Si(CH3)2O-)n	101.62	Click
Si	2p	(Si(CH3)2-O-)n	101.62	Click
Si	2p	(-Si(CH3)2-C6H4-Si(CH3)2-O-)n	101.70	Click
Si	2p	Si2N2O	101.70	Click
Si	2p	Al2N6O2Si4	101.70	Click
Si	2p	Al3N5O3Si3	101.70	Click
Si	2p	Al4N4O4Si2	101.70	Click
Si	2p	(MgO)0.047Si3N4	101.70	Click
Si	2p	Al0.55Si0.10P0.35O2.2	101.80	Click
Si	2p	Si3N4/Si	101.80	Click
Si	2p	Si3N4	101.80	Click
Si	2p	(PbF2)15.6(PbO)56.0(SiO2)28.4	101.80	Click
Si	2p	Na11.9(AlO2)11.9(SiO2)12.1	101.80	Click
Si	2p	(SiO2)0.667(Na2O)0.287(Fe2O3)0.046	101.80	Click
Si	2p	Si3N4/InP	101.90	Click
Si	2p	SiOx	101.90	Click
Si	2p	O2/Si	101.90	Click
Si	2p	Si3N4/Si	101.90	Click
Si	2p	Na7.5Al6Si6O24S4.5	101.90	Click
Si	2p	SiO0.93	101.90	Click
Si	2p	B22.5Si18.2O18.5N40.5	101.90	Click
Si	2p	SiN1.1	101.90	Click
Si	2p	Si3N4/Si	102.00	Click
Si	2p	SiO	102.00	Click
Si	2p	SiO2(Al2O3)0.22	102.00	Click
Si	2p	C6H9O(CH2)2Si((CH3)2)OSi((CH3)2)(CH2)2C6H9O	102.00	Click
Si	2p	B22.4Si16.7O24.1N36.5	102.00	Click
Si	2p	Si3N4	102.04	Click
Si	2p	(-Si(CH3)2O-)n	102.10	Click
Si	2p	(Si(CH3)2-O-)n	102.10	Click
Si	2p	(-Si(CH3)(C6H5)O-)n	102.10	Click
Si	2p	(Si(CH3)(C6H5)-O-)n	102.10	Click
Si	2p	Si3N4	102.10	Click
Si	2p	SiO0.35N1.1/Si	102.10	Click
Si	2p	SiO2(Al2O3)0.22	102.10	Click
Si	2p	K0.7(NaCa)0.3(Mg2.84Fe0.02)Al1.2Si2.8O10(OH1.5F0.50)	102.10	Click
Si	2p	K0.7(NaCa)0.3(Mg2.84Fe0.02)Al1.2Si2.8O10(OH1.5F0.50)	102.10	Click
Si	2p	B17.8Si17.0O47.5N19.1	102.10	Click
Si	2p	(-Si(CH3)2O-)n	102.20	Click
Si	2p	(-Si(C6H5)(CH3)O-)n	102.20	Click
Si	2p	(-Si(C6H5)2O-)n	102.20	Click
Si	2p	(MoO3)90(SiO)10	102.20	Click
Si	2p	SiO0.7N0.9/Si	102.20	Click
Si	2p	SiO2(Al2O3)0.55	102.20	Click
Si	2p	SiO2(Al2O3)0.55	102.20	Click
Si	2p	SiO1.02	102.20	Click
Si	2p	SiO1.05	102.20	Click
Si	2p	(SiO2)0.694(Na2O)0.306	102.20	Click
Si	2p	Na85.4(AlO2)85.4(SiO2)106.6	102.20	Click
Si	2p	(-Si(CH3)2O-)n	102.30	Click
Si	2p	(-Si(CH3)2O-)n	102.30	Click
Si	2p	Al0.44Si0.41P0.13O2.1	102.30	Click
Si	2p	(MoO3)80(SiO)20	102.30	Click
Si	2p	CaTiSiO5	102.30	Click
Si	2p	K0.9(Mg1.56Fe1.14Ti0.11)Al0.96Si3.0O10(OH1.44F0.56)	102.30	Click
Si	2p	K0.9(Mg1.56Fe1.14Ti0.11)Al0.96Si3.0O10(OH1.44F0.56)	102.30	Click
Si	2p	Na88Al86Si106O384	102.30	Click
Si	2p	C6H9O(CH2)2Si((CH3)2)OSi((CH3)2)OSi((CH3)2)OSi((CH3)2)(CH2)2C6H9O	102.30	Click
Si	2p	Ca6(Si6O17)(OH)2	102.30	Click
Si	2p	Na69(NH4)13Al82Si110O384	102.30	Click
Si	2p	Ca10(PO4)4.4(SiO4)1.24(CO3)0.36(OH)1.12	102.30	Click
Si	2p	(-Si(CH3)2O-)n	102.40	Click
Si	2p	(-Si(CH3)2O-)n	102.40	Click
Si	2p	(-Si(CH3)2O-)n	102.40	Click
Si	2p	(-CH2CH(Si(OCH3)3)-)n	102.40	Click
Si	2p	(-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n	102.40	Click
Si	2p	(-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n	102.40	Click
Si	2p	SiO2(Al2O3)0.22	102.40	Click
Si	2p	Y2O3/SiO2/Si	102.40	Click
Si	2p	Si35O26N38	102.40	Click
Si	2p	Si33O44N22	102.40	Click
Si	2p	SiO1.19	102.40	Click
Si	2p	SiO1.24	102.40	Click
Si	2p	NaAlSi2O6.H2O	102.40	Click
Si	2p	HSCH2(CH2)9CH(OH)+C18H37SiCl3	102.40	Click
Si	2p	(Na,Ca)0.5Fe1.0[Mg1.2Fe1.5Al2.3][Si6.8Al1.2O22](OH)2	102.40	Click
Si	2p	(SiO2)55(CaO)21.5(Al2O3)14.5(B2O3)6.0(Na2O)0.8(MgO)0.6(Fe2O3)0.4(TiO2)0.3(F2)0.6(FO2)0.3(K2O)0.1	102.40	Click
Si	2p	HOOC-(Si(CH3)2-O-)n-COOH	102.40	Click
Si	2p	Na52(NH4)30Al82Si110O384	102.40	Click
Si	2p	Na15(NH4)66Al82Si110O384	102.40	Click
Si	2p	(-Si(CH3)2O-)n	102.50	Click
Si	2p	(Si(CH3)2-O-)n	102.50	Click
Si	2p	(MoO3)70(SiO)30	102.50	Click
Si	2p	SiF4/Si	102.50	Click
Si	2p	SiF4/Si	102.50	Click
Si	2p	SiO2(Al2O3)2.1	102.50	Click
Si	2p	(MoO3)70(SiO)30	102.60	Click
Si	2p	O2/Sr/Si	102.60	Click
Si	2p	(-Si(OCH3)2O-)n	102.60	Click
Si	2p	Al2Si2O5(OH)4	102.65	Click
Si	2p	(MoO3)70(SiO)30	102.70	Click
Si	2p	(MoO3)60(SiO)40	102.70	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)11NO2/Si	102.70	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)7C(O)OCH3/Si	102.70	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)7C(O)OH/Si	102.70	Click
Si	2p	SiO2(Al2O3)0.55	102.70	Click
Si	2p	Al6Si2O13	102.70	Click
Si	2p	SiO1.35	102.70	Click
Si	2p	Al2SiO5	102.70	Click
Si	2p	(MoO3)70(SiO)30	102.80	Click
Si	2p	SiO2/Si	102.80	Click
Si	2p	(MoO3)50(SiO)50	102.80	Click
Si	2p	ZrSiO4	102.80	Click
Si	2p	Si32O49N19	102.80	Click
Si	2p	SiO1.52	102.80	Click
Si	2p	SiO1.49	102.80	Click
Si	2p	Na54.5(AlO2)54.5(SiO2)137.5	102.80	Click
Si	2p	H3Na45(AlO2)56(SiO2)136	102.80	Click
Si	2p	(K,Ca)2[Mg4.3Fe0.7][Si7.2Al0.8O22](OH)2	102.80	Click
Si	2p	(Ca1.6Mg0.4)[Mg2.0Fe1.9Al1.0][Si7.2Al0.8O22](OH,Cl)	102.80	Click
Si	2p	CH3Si((C6H5)2)OSi(CH3)(C6H5)OSi((C6H5)2)CH3	102.82	Click
Si	2p	Al0.35Si0.48P0.16O2.2	102.90	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)11NH2/Si	102.90	Click
Si	2p	(-O)3Si(CH2)3NHC(O)(CH2)16CH3/Si	102.90	Click
Si	2p	ZrO0.15H2.25Na0.08[(AlO2)2.63(SiO2)93.37]	102.90	Click
Si	2p	Na60Al63Si128O384	102.90	Click
Si	2p	Ca2[Mg5][Si8O22]OH2	102.90	Click
Si	2p	Na26.5H24.5Al51Si141O384	102.90	Click
Si	2p	Ca2[Mg5][Si8O22](OH)2	102.90	Click
Si	2p	SiO2	103.00	Click
Si	2p	SiO2	103.00	Click
Si	2p	SiO2/Si	103.00	Click
Si	2p	NiSiO3	103.00	Click
Si	2p	SiO2(Al2O3)2.1	103.00	Click
Si	2p	Ta2O5/Si	103.00	Click
Si	2p	Ta2O5/Si	103.00	Click
Si	2p	Si/(CH3(CH2)16C(O)O)2Cd	103.00	Click
Si	2p	Pt4H7Na41(AlO2)56(SiO2)136	103.00	Click
Si	2p	H20Na28(AlO2)56(SiO2)136	103.00	Click
Si	2p	Al0.041Si0.264Na0.04K0.02O0.635	103.00	Click
Si	2p	H7Na41(AlO2)56(SiO2)136	103.00	Click
Si	2p	Pt4H20Na28(AlO2)56(SiO2)136	103.00	Click
Si	2p	H11Na37(AlO2)56(SiO2)136	103.00	Click
Si	2p	Pt4H3Na45(AlO2)56(SiO2)136	103.00	Click
Si	2p	Pt4H11Na37(AlO2)56(SiO2)136	103.00	Click
Si	2p	SiO2/Si	103.10	Click
Si	2p	SiO2/Si	103.10	Click
Si	2p	SiO2	103.10	Click
Si	2p	Ta2O5/Si	103.10	Click
Si	2p	SiO1.78	103.10	Click
Si	2p	SiO2	103.20	Click
Si	2p	SiO2	103.20	Click
Si	2p	SiO2	103.20	Click
Si	2p	SiO2	103.20	Click
Si	2p	SiOx	103.20	Click
Si	2p	O2/Si	103.20	Click
Si	2p	Al0.2Si0.8O2.2	103.20	Click
Si	2p	O2/Sr/Si	103.20	Click
Si	2p	O2/Sr/Si	103.20	Click
Si	2p	O2/Sr/Si	103.20	Click
Si	2p	SiO2/Si	103.20	Click
Si	2p	SiO2/Si	103.20	Click
Si	2p	SiO2	103.20	Click
Si	2p	CH3(CH2)17SiCl3/Al	103.20	Click
Si	2p	Na5.2(NH4)46.8Al52Si140O384	103.20	Click
Si	2p	SiO1.91	103.20	Click
Si	2p	B22.5Si18.2O18.5N40.5	103.20	Click
Si	2p	Si0.284Zr0.031O0.657F0.028	103.20	Click
Si	2p	B17.8Si17.0O47.5N19.1	103.20	Click
Si	2p	B22.4Si16.7O24.1N36.5	103.20	Click
Si	2p	SiO2/Si	103.22	Click
Si	2p	SiOx/Si	103.30	Click
Si	2p	SiO2	103.30	Click
Si	2p	SiO2/Si	103.30	Click
Si	2p	SiO2	103.30	Click
Si	2p	SiO2	103.30	Click
Si	2p	Na0.6H27.4Al28Si164O384	103.30	Click
Si	2p	Si0.251Zr0.074O0.651F0.025	103.30	Click
Si	2p	B15.2Si17.9O64.0N3.0	103.30	Click
Si	2p	B19.7Si15.2O57.2N7.8	103.30	Click
Si	2p	Si0.255Zr0.072O0.665F0.008	103.30	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	(-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2/Si	103.40	Click
Si	2p	SiO2/Si	103.40	Click
Si	2p	SiO2/Si	103.40	Click
Si	2p	SiO1.9	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	SiO2	103.40	Click
Si	2p	O2/Si0.8Ge0.2/Si	103.40	Click
Si	2p	Si/O2	103.40	Click
Si	2p	SiO2/Al/Mo	103.40	Click
Si	2p	SiO2/Si	103.41	Click
Si	2p	SiO2/Si	103.49	Click
Si	2p	SiO2	103.50	Click
Si	2p	SiO2	103.50	Click
Si	2p	(-CH2CH(Si(OCH3)3)-)n	103.50	Click
Si	2p	(-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n	103.50	Click
Si	2p	SiO2/Si	103.50	Click
Si	2p	SiO2	103.50	Click
Si	2p	SiO2	103.50	Click
Si	2p	SiO2	103.50	Click
Si	2p	SiO2	103.50	Click
Si	2p	B15.9Si19.0O65.1	103.50	Click
Si	2p	Si0.397Ge0.9O0.594	103.50	Click
Si	2p	Si0.284Zr0.042O0.656F0.017	103.50	Click
Si	2p	Si0.255Zr0.061O0.675F0.008	103.50	Click
Si	2p	Si0.294Zr0.029O0.670F0.006	103.50	Click
Si	2p	Si0.057Zr0.269O0.597F0.078	103.50	Click
Si	2p	Si0.277Zr0.043O0.642F0.038	103.50	Click
Si	2p	Si0.314Zr0.012O0.655F0.019	103.50	Click
Si	2p	SiOx/Si	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2/Si	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	SiO2	103.60	Click
Si	2p	B19.2Si15.3O65.4	103.60	Click
Si	2p	Pt/SiO2/Si	103.61	Click
Si	2p	Mg2[Mg5][Si8O22]OH2	103.65	Click
Si	2p	Mg2[Mg5][Si8O22](OH)2	103.65	Click
Si	2p	SiO2/Si	103.67	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2/Si	103.70	Click
Si	2p	SiO2/Si	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2	103.70	Click
Si	2p	SiO2.05	103.70	Click
Si	2p	SiO2.08	103.70	Click
Si	2p	Na0.2H7.4Al7.6Si184.4O384	103.70	Click
Si	2p	Si0.316Zr0.013O0.664F0.008	103.70	Click
Si	2p	Si0.300Zr0.028O0.640F0.032	103.70	Click
Si	2p	Si0.322Zr0.005O0.655F0.019	103.70	Click
Si	2p	SiO2	103.80	Click
Si	2p	SiO2	103.80	Click
Si	2p	(-Si(CH3)2O-)n	103.80	Click
Si	2p	SiO2	103.80	Click
Si	2p	SiO2	103.80	Click
Si	2p	SiO2	103.80	Click
Si	2p	SiO2	103.80	Click
Si	2p	SiO1.8	103.80	Click
Si	2p	SiO1.4	103.80	Click
Si	2p	SiO0.4	103.80	Click
Si	2p	Si0.380Ge0.05O0.615	103.80	Click
Si	2p	SiO2	103.90	Click
Si	2p	SiO2/Mo	103.90	Click
Si	2p	SiO2/Al/Mo	103.90	Click
Si	2p	Si0.334O0.649F0.017	103.90	Click
Si	2p	Si0.334O0.661F0.005	103.90	Click
Si	2p	Si0.328Zr0.001O0.665F0.007	103.90	Click
Si	2p	SiOx	104.00	Click
Si	2p	O2/Si	104.00	Click
Si	2p	SiO2	104.00	Click
Si	2p	SiO2	104.00	Click
Si	2p	SiO2	104.00	Click
Si	2p	SiO2	104.00	Click
Si	2p	SiO2	104.00	Click
Si	2p	SiO2	104.10	Click
Si	2p	Si0.297Ge0.115O0.588	104.50	Click
Si	2p	SiF4/Si	105.00	Click
Si	2p	SiF4/Si	105.00	Click
Si	2p	SiF4/Si	107.70	Click

→ Periodic Table

Statistical Analysis of Binding Energies in NIST XPS Database of BEs

The International XPS Spectra-Base of Monochromatic XPS Reference Spectra

Silicon Spectra – p-Si <111> single crystal wafer

Six (6) Chemical State Tables of Si (2p) BEs