Silicon Spectra – Si3N4 – Low Pressure CVD

Sio n-Sio p-Sio SiC SiO SiO2 SiO2-nH2O Si3N4 SiGex SiON
Al2SiO5 Al2Si2O13 Be2SiO4 CaTiSiO5 K2SiO3 MgSiO3 Mg3Si4O10(OH)2 Na2Si3O7 ZrSiO4 Silicic Acid
PDMS PMPS Soda-lime Glass NIST 610 NIST 612 NIST 614 Ba-Borosilicate Silica Gel Colloidal SiO2

XPS Spectra
Silicon (Si) Compounds
The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra.
Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.
Peak-fits are guides for practical, real-world applications. Peak-fits are not fully optimized or designed to test any theory.

Silicon Nitride  (Si3N4 – LP-CVD film, 1μ)
Survey, Peak-fits, BEs, FWHMs, and Peak Labels

→  Periodic Table   → Six (6) BE Tables
Survey Spectrum from Si3N4
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag (3d5/2) FWHM = 1.3 eV

→  Periodic Table  → Six (6) BE Tables
Si (2p) Spectrum from Si3N4 – Raw
Fresh exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Si (2p) Spectrum from Si3N4 – Peak-Fit
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV

 
Si (2p-2s) Spectrum from Si3N4 – Extended 
Fresh exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Si (2p) Spectrum from Si3N4 – Raw – Expanded
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV

→  Periodic Table  → Six (6) BE Tables
N (1s) Spectrum from Si3N4 – Raw
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 N (1s) Spectrum from Si3N4 – Peak-fit
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
→  Periodic Table  → Six (6) BE Tables
N (1s) Spectrum from Si3N4 – Extended 
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 N (1s) Spectrum from Si3N4 – Raw – Expanded
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
→  Periodic Table  → Six (6) BE Tables
C (1s) Spectrum from Si3N4 – Peak-fit – As measured 
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 284.21 eV, Ag FWHM = 0.75 eV		 C (1s) Spectrum from Si3N4 – Peak-Fit – Corrected
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
→  Periodic Table  → Six (6) BE Tables
Si (2s) Spectrum from Si3N4 – Raw
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Si (2s) Spectrum from Si3N4 – Peak-Fit
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
 
→  Periodic Table  → Six (6) BE Tables
N (KLL) Auger Spectrum from Si3N4 – Raw
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Valence Band Signals from Si3N4 – Raw
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
 
Overlays
→  Periodic Table  → Six (6) BE Tables
Valence Band Spectra – Overlay of Sio and Si3N4
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Si (2p) Spectra – Overlay of Sio and Si3N4
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV
→  Periodic Table  → Six (6) BE Tables
Si (2p) Spectra – Overlay of SiO2 and Si3N4
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV		 Si (2p) Spectra – Overlay of SiC and Si3N4
Freshly exposed bulk, Flood gun is ON, C (1s) BE = 285.0 eV, Ag FWHM = 0.75 eV

End-of-spectra

Price to purchase raw data sets:
Raw spectra – VAMAS ASCII format ($6)
Raw spectra – SDP binary format ($5)
SDP v9 – $145 (3 yr license)

Transmission Function Tests
December 2015 – Transmission Function of Thermo K-Alpha Plus
→  Periodic Table 
Survey Spectra of Ion Etched Copper (Cr), PEs = 50, 100, 150 and 200 eV
→  Periodic Table 
March 2016 – Transmission Function of Thermo K-Alpha Plus 
 
Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 150 and 200 eV
→  Periodic Table  
August 2019 – Transmission Function of Thermo K-Alpha Plus
 
Survey Spectra of HOPG (C), PEs = 20, 50, 100 and 200 eV
→  Periodic Table  
January 2022 – Transmission Function of Thermo K-Alpha Plus
Survey Spectra of Ion Etched Copper (Cr), PEs = 100, 120, 140, 160, 180 and 200 eV

Six (6) Chemical State Tables of Si (2p) BEs

  • The XPS Library Spectra-Base
  • PHI Handbook
  • Thermo-Scientific Website
  • XPSfitting Website
  • Techdb Website
  • NIST Website

Notes of Caution when using Published BEs and BE Tables from Insulators and Conductors:

    • Accuracy of Published BEs
      • The accuracy depends on the calibration BEs used to calibrate the energy scale of the instrument.  Cu (2p3/2) BE can vary from 932.2 to 932.8 eV for old publications
      • Different authors use different BEs for the C (1s) BE of the hydrocarbons found in adventitious carbon that appears on all materials and samples.  From 284.2 to 285.3 eV
      • The accuracy depends on when the authors last checked or adjusted their energy scale to produce the expected calibration BEs
    • There are uncertainties and error ranges in nearly all BEs 
      • Flood guns
    • Worldwide Differences in Energy Scale Calibrations
      • For various reasons authors still use older energy scale calibrations
      • Some authors still adjust their energy scale so Cu (2p3/2) appears at 932.2 eV or 932.8 eV because this is what the maker taught them
      • This range causes BEs in the higher BE end to be larger than expected
      • This variation increases significantly above 600 eV BE
    • Charge Compensation
      • Samples that behave as true insulators normally require the use of a charge neutralizer (electron flood gun with or without Ar+ ions) so that the measured chemical state spectra can be produced without peak-shape distortions or sloping tails on the low BE side of the peak envelop.
      • Floating all samples (conductive, semi-conductive, and non-conductive) and always using the electron flood gun is considered to produce more reliable BEs and is recommended.
    • Charge Referencing Methods for Insulators
      • Charge referencing is a common method, but it can produce results that are less reliable.
      • When an electron flood gun is used, the BE scale will usually shift to lower BE values by 0.01 to 5.0 eV depending on your voltage setting. Normally, to correct for this flood gun induced shift, the BE of the hydrocarbon C (1s) peak maximum from adventitious carbon is used to correct for the charge induced shift.
      • The hydrocarbon peak is normally the largest peak at the lowest BE.
      • Depending on your preference or training, the C (1s) BE assigned to this hydrocarbon peak varies from 284.8 to 285.0 eV.  Other BEs can be as low as 284.2 eV or as high as 285.3 eV
      • Native oxides that still show the pure metal can suffer differential charging that causes the C (1s) and the O (1s) and the Metal Oxide BE to be larger
      • When using the electron flood gun, the instrument operator should adjust the voltage and the XY position of the electron flood gun to produce peaks from a strong XPS signal (eg O (1s) or C (1s) having the most narrow FWHM and the lowest experimentally measured BE.

→  Periodic Table 

Table #1

Si (2p) Chemical State BEs from:  “The XPS Library Spectra-Base”

C (1s) BE = 285.0 eV for TXL BEs
and C (1s) BE = 284.8 eV for NIST BEs

Element Atomic # Compound As-Measured by TXL or NIST Average BE Largest BE Hydrocarbon C (1s) BE Source
Si 14 Mg2Si 98.5 eV 285.0 eV The XPS Library
Si 14 NiSi (N*6) 98.8 eV 99.7 eV 284.8 eV Avg BE – NIST
Si 14 MoSi2 99.0 eV 285.0 eV The XPS Library
Si 14 Si3H2 (N*4) 99.0 eV 284.8 eV Avg BE – NIST
Si 14 Si (p) 99.2 eV 285.0 eV The XPS Library
Si 14 Si – element 99.5 eV 285.0 eV The XPS Library
Si 14 Si (n) 99.8 eV 285.0 eV The XPS Library
Si 14 SiC (N*5) 100.4 eV 100.7 eV 284.8 eV Avg BE – NIST
Si 14 SiC 100.5 eV 285.0 eV The XPS Library
Si 14 Si2O 100.8 eV 285.0 eV The XPS Library
Si 14 Si3N4 (N*12) 101.5 eV 102.1 eV 284.8 eV Avg BE – NIST
Si 14 Si-O 101.5 eV 285.0 eV The XPS Library
Si 14 Si3N4 101.7 eV 285.0 eV The XPS Library
Si 14 SiCN 101.8 eV 285.0 eV The XPS Library
Si 14 B4Si  (N*1) 101.9 eV 284.8 eV Avg BE – NIST
Si 14 Pyrope 102.1 eV 285.0 eV The XPS Library
Si 14 HfSiOx 102.3 eV 285.0 eV The XPS Library
Si 14 Si2O3 102.3 eV 285.0 eV The XPS Library
Si 14 Mica 102.4 eV 285.0 eV The XPS Library
Si 14 M-SiO3 (N*2) 102.4 eV 103.3 eV 284.8 eV Avg BE – NIST
Si 14 Si-PDMS 102.4 eV 102.6 eV 285.0 eV The XPS Library
Si 14 Al2SiO5 102.8 eV 285.0 eV The XPS Library
Si 14 Aluminosilicates 102.8 eV 285.0 eV The XPS Library
Si 14 SiON 102.8 eV 103.0 eV 285.0 eV The XPS Library
Si 14 LiAlSi2O6 103.0 eV 285.0 eV The XPS Library
Si 14 SiO2 103.1 eV 285.0 eV The XPS Library
Si 14 SiO2 thermal 103.2 eV 285.0 eV The XPS Library
Si 14 SiO2 fused 103.4 eV 285.0 eV The XPS Library
Si 14 Si-(OH)4  Opal 103.7 eV 285.0 eV The XPS Library

Charge Referencing

  • (N*number) identifies the number of NIST BEs that were averaged to produce the BE in the middle column.
  • Binding Energy Scale Calibration expects Cu (2p3/2) BE = 932.62 eV and Au (4f7/2) BE = 83.98 eV.  BE (eV) Uncertainty Range:  +/- 0.2 eV
  • Charge Referencing of insulators is defined such that the Adventitious Hydrocarbon C (1s) BE (eV) = 285.0 eV.  NIST uses C (1s) BE = 284.8 eV 
  • Note:   Ion etching removes adventitious carbon, implants Ar (+), changes conductivity of surface, and degrades chemistry of various chemical states.
  • Note:  Ion Etching changes BE of C (1s) hydrocarbon peak.
  • TXL – abbreviation for: “The XPS Library” (https://xpslibrary.com).  NIST:  National Institute for Science and Technology (in USA)

→  Periodic Table 

Table #2

Si (2p) Chemical State BEs from:  “PHI Handbook”

C (1s) BE = 284.8 eV

→  Periodic Table 

Copyright ©:  Ulvac-PHI

Table #3

Si (2p) Chemical State BEs from:  “Thermo-Scientific” Website

C (1s) BE = 284.8 eV

Chemical state Binding energy Si (2p) / eV
Si element 99.4
Si3N4 101.7
ZrSiO4 102
Organic Si ~102
Aluminosilicate 102.7
SiO2 103.5

→  Periodic Table 

Copyright ©:  Thermo Scientific 

Table #4

Si (2p) Chemical State BEs from:  “XPSfitting” Website

Chemical State BE Table derived by Averaging BEs in the NIST XPS database of BEs
C (1s) BE = 284.8 eV

→  Periodic Table

Copyright ©:  Mark Beisinger

Table #5

Si (2p) Chemical State BEs from:  “Techdb.podzone.net” Website

XPS Spectra – Chemical Shift | Binding Energy
C (1s) BE = 284.6 eV

XPS(X線光電子分光法)スペクトル 化学状態 化学シフト ケミカルシフト

Element Level Compound B.E.(eV) min max
Si 2p Silicon 99.2 ±0.4 98.8 ～ 99.5
Si 2p Silicides 99.7 ±0.3 99.4 ～ 99.9
Si 2p Carbides 100.4 ±0.5 99.9 ～ 100.9
Si 2p Nitrides 101.9 ±0.4 101.5 ～ 102.2
Si 2p Silicones (Silanes) 102.4 ±0.5 101.9 ～ 102.9
Si 2p Silicates 102.5 ±0.5 102.0 ～ 103.0
Si 2p Silica 103.6 ±0.4 103.2 ～ 103.9

→  Periodic Table 

 

Histograms of NIST BEs for Si (2p) BEs

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Histogram indicates:  99.4 eV for Sio based on 37 literature BEs
Doping type is Unknown
n-Si can be 0.6 eV smaller than p-Si		 Histogram indicates:  103.5 eV for SiO2 based on 54 literature BEs

Histogram indicates:  101.9 eV for Si3N4 based on 15 literature BEs Histogram indicates:  99.2 eV for SiHx based on 16 literature BEs

Histogram indicates:  102.5 eV for -((CH3)2SiO)n– based on 7 literature BEs
PDMS = Silicone Oil = Poly-dimethylsiloxane		 Histogram indicates:  100.6 eV for SiC based on 11 literature BEs

Table #6


NIST Database of Si (2p) Binding Energies

NIST Standard Reference Database 20, Version 4.1

Data compiled and evaluated
by
Alexander V. Naumkin, Anna Kraut-Vass, Stephen W. Gaarenstroom, and Cedric J. Powell
©2012 copyright by the U.S. Secretary of Commerce on behalf of the United States of America. All rights reserved.

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Element Spectral Line Formula Energy (eV) Reference
Si 2p Tm/Si 98.00  Click
Si 2p Tm/Si 98.00  Click
Si 2p Gd5Si3 98.10  Click
Si 2p Si 98.40  Click
Si 2p Si/Ba 98.40  Click
Si 2p FeSi 98.60  Click
Si 2p GdSi 98.60  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)7C(O)OH/Si 98.60  Click
Si 2p Si 98.70  Click
Si 2p Er/Si 98.70  Click
Si 2p SiO2/Si 98.70  Click
Si 2p Tm/Si 98.70  Click
Si 2p Tm/Si 98.70  Click
Si 2p Tm/Si 98.70  Click
Si 2p TiSi2 98.80  Click
Si 2p SiO2/Si 98.80  Click
Si 2p SiO2/Si 98.80  Click
Si 2p Au34Si66 98.80  Click
Si 2p Si/(CH3(CH2)16C(O)O)2Cd 98.80  Click
Si 2p Si/AlAs 98.89  Click
Si 2p Si 98.90  Click
Si 2p Si 98.90  Click
Si 2p FeSi2 98.90  Click
Si 2p Er/Si 98.90  Click
Si 2p Er/Si 98.90  Click
Si 2p SiO2/Si 98.90  Click
Si 2p Au59Si41 98.90  Click
Si 2p Si/Y 98.90  Click
Si 2p Gd3Si5 98.90  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)16CH3/Si 98.90  Click
Si 2p Si/(-O)3Si(CH2)3NHC(O)(CH2)11NO2 98.90  Click
Si 2p Si:H 98.90  Click
Si 2p Si/SiO2/Zr 98.90  Click
Si 2p Zr1.02Si0.96Te1.02 98.90  Click
Si 2p Si/Pt 98.97  Click
Si 2p Si/Pt 98.97  Click
Si 2p Si 99.00  Click
Si 2p FeSi 99.00  Click
Si 2p Tm/Si 99.00  Click
Si 2p Tm/Si 99.00  Click
Si 2p Tm/Si 99.00  Click
Si 2p Si/(-O)3Si(CH2)3NHC(O)(CH2)11NH2 99.00  Click
Si 2p Si/(-O)3Si(CH2)3NHC(O)(CH2)7C(O)OCH3 99.00  Click
Si 2p Si/O2 99.00  Click
Si 2p Si/Ir 99.02  Click
Si 2p Si/Ir 99.07  Click
Si 2p Si 99.10  Click
Si 2p Si 99.10  Click
Si 2p SiO2/Si 99.10  Click
Si 2p Au45Si55 99.10  Click
Si 2p SiOx/Si 99.10  Click
Si 2p Si/SiO2/Zr 99.10  Click
Si 2p Si 99.20  Click
Si 2p Si 99.20  Click
Si 2p FeSi2 99.20  Click
Si 2p Si/Y 99.20  Click
Si 2p SiF4/Si 99.20  Click
Si 2p SiF4/Si 99.20  Click
Si 2p Si 99.22  Click
Si 2p Ag/SiHx 99.23  Click
Si 2p CoSi2/Si 99.27  Click
Si 2p Si 99.30  Click
Si 2p Si 99.30  Click
Si 2p Si 99.30  Click
Si 2p Si 99.30  Click
Si 2p FeSi2 99.30  Click
Si 2p Er/Si 99.30  Click
Si 2p Er/Si 99.30  Click
Si 2p SiOx/Si 99.30  Click
Si 2p SiOx/Si 99.30  Click
Si 2p Ta2O5/Si 99.30  Click
Si 2p Ta2O5/Si 99.30  Click
Si 2p Ta2O5/Si 99.30  Click
Si 2p Si/SiO2 99.30  Click
Si 2p SiOx/Si 99.34  Click
Si 2p Ag/SiHx 99.35  Click
Si 2p SiO2/Si 99.37  Click
Si 2p SiOx/Si 99.40  Click
Si 2p Si 99.40  Click
Si 2p Si 99.40  Click
Si 2p MoSi2.2 99.40  Click
Si 2p Y2O3/SiO2/Si 99.40  Click
Si 2p Y/SiO2/Si 99.40  Click
Si 2p (ZrO2)91(Y2O3)9/Si 99.40  Click
Si 2p (ZrO2)91(Y2O3)9/Si 99.40  Click
Si 2p Si/SiO2 99.40  Click
Si 2p Si 99.42  Click
Si 2p Si/Ba 99.45  Click
Si 2p Si/GaAs 99.49  Click
Si 2p SiOx 99.50  Click
Si 2p O2/Si 99.50  Click
Si 2p SiO2/Si 99.50  Click
Si 2p SiHx 99.50  Click
Si 2p SiHx 99.50  Click
Si 2p Si/Y 99.50  Click
Si 2p SiOx/Si 99.50  Click
Si 2p Si/GaAs 99.50  Click
Si 2p Pd/Si 99.50  Click
Si 2p Si/Ir 99.52  Click
Si 2p Si/GaAs 99.52  Click
Si 2p Si/GaAs 99.53  Click
Si 2p Si/Ba 99.55  Click
Si 2p Si/GaAs 99.55  Click
Si 2p Si/GaAs 99.55  Click
Si 2p Si/GaAs 99.57  Click
Si 2p Si 99.59  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p Si 99.60  Click
Si 2p SiH0.1 99.60  Click
Si 2p Si/GaAs 99.60  Click
Si 2p Si 99.61  Click
Si 2p Si/Ir 99.62  Click
Si 2p SiH0.2 99.65  Click
Si 2p Si 99.67  Click
Si 2p FeSi2 99.70  Click
Si 2p Pt/Si 99.72  Click
Si 2p Si 99.80  Click
Si 2p Te/Si 99.80  Click
Si 2p Te/Si 99.80  Click
Si 2p SiO1.4 99.80  Click
Si 2p SiO0.4 99.80  Click
Si 2p Si/GaAs 99.81  Click
Si 2p SiC 99.85  Click
Si 2p Si/GaAs 99.87  Click
Si 2p SiO2/Si 99.92  Click
Si 2p Si/GaAs 99.92  Click
Si 2p Si/GaAs 99.95  Click
Si 2p Si/GaAs 99.96  Click
Si 2p Si/GaAs 99.99  Click
Si 2p SiC1.5 100.00  Click
Si 2p Si/GaAs 100.08  Click
Si 2p SiC 100.10  Click
Si 2p SiC1.3 100.10  Click
Si 2p SiC 100.20  Click
Si 2p SiC 100.20  Click
Si 2p SiC1.9 100.20  Click
Si 2p SiC2.3 100.20  Click
Si 2p Pt/Si 100.22  Click
Si 2p SiC 100.30  Click
Si 2p SiC1.7 100.30  Click
Si 2p SiC 100.40  Click
Si 2p SiC 100.40  Click
Si 2p SiC 100.40  Click
Si 2p SiOx 100.40  Click
Si 2p O2/Si 100.40  Click
Si 2p Pd2Si 100.50  Click
Si 2p (-(CH3)x(SiHy)-)n 100.50  Click
Si 2p SiC 100.60  Click
Si 2p SiC 100.60  Click
Si 2p Si3N4 100.60  Click
Si 2p SiC 100.70  Click
Si 2p Pd[C&=CSi(CH3)3]2(P(C6H5)3)2 100.70  Click
Si 2p SiC 100.80  Click
Si 2p SiC 100.80  Click
Si 2p SiOx 101.10  Click
Si 2p O2/Si 101.10  Click
Si 2p (-CH2CH(Si(OCH3)3)-)n 101.10  Click
Si 2p (-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n 101.10  Click
Si 2p (-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n 101.10  Click
Si 2p (-CH2CH(Si(CH3)3)-)n 101.20  Click
Si 2p CaF2/Si 101.30  Click
Si 2p CaF2/Si 101.30  Click
Si 2p CaF2/Si 101.30  Click
Si 2p (SiO2)0.517(Na2O)0.299(Fe2O3)0.18 101.30  Click
Si 2p (-Si(OCH3)2O-)xAly 101.40  Click
Si 2p Si3N4 101.50  Click
Si 2p (PbF2)9.0(PbO)63.7(SiO2)27.3 101.50  Click
Si 2p (PbF2)17.2PbO)54.3(SiO2)28.5 101.50  Click
Si 2p (SiO2)0.563(Na2O)0.304(Fe2O3)0.13 101.50  Click
Si 2p (PbF2)12.7(PbO)58.2(SiO2)29.1 101.60  Click
Si 2p (PbF2)3.2(PbO)68.7(SiO2)28.1 101.60  Click
Si 2p AlN7OSi5 101.60  Click
Si 2p Na12[Al12Si12O48].18H2O 101.60  Click
Si 2p (SiO2)0.618(Na2O)0.298(Fe2O3)0.085 101.60  Click
Si 2p (-Si(CH3)2O-)n 101.62  Click
Si 2p (Si(CH3)2-O-)n 101.62  Click
Si 2p (-Si(CH3)2-C6H4-Si(CH3)2-O-)n 101.70  Click
Si 2p Si2N2O 101.70  Click
Si 2p Al2N6O2Si4 101.70  Click
Si 2p Al3N5O3Si3 101.70  Click
Si 2p Al4N4O4Si2 101.70  Click
Si 2p (MgO)0.047Si3N4 101.70  Click
Si 2p Al0.55Si0.10P0.35O2.2 101.80  Click
Si 2p Si3N4/Si 101.80  Click
Si 2p Si3N4 101.80  Click
Si 2p (PbF2)15.6(PbO)56.0(SiO2)28.4 101.80  Click
Si 2p Na11.9(AlO2)11.9(SiO2)12.1 101.80  Click
Si 2p (SiO2)0.667(Na2O)0.287(Fe2O3)0.046 101.80  Click
Si 2p Si3N4/InP 101.90  Click
Si 2p SiOx 101.90  Click
Si 2p O2/Si 101.90  Click
Si 2p Si3N4/Si 101.90  Click
Si 2p Na7.5Al6Si6O24S4.5 101.90  Click
Si 2p SiO0.93 101.90  Click
Si 2p B22.5Si18.2O18.5N40.5 101.90  Click
Si 2p SiN1.1 101.90  Click
Si 2p Si3N4/Si 102.00  Click
Si 2p SiO 102.00  Click
Si 2p SiO2(Al2O3)0.22 102.00  Click
Si 2p C6H9O(CH2)2Si((CH3)2)OSi((CH3)2)(CH2)2C6H9O 102.00  Click
Si 2p B22.4Si16.7O24.1N36.5 102.00  Click
Si 2p Si3N4 102.04  Click
Si 2p (-Si(CH3)2O-)n 102.10  Click
Si 2p (Si(CH3)2-O-)n 102.10  Click
Si 2p (-Si(CH3)(C6H5)O-)n 102.10  Click
Si 2p (Si(CH3)(C6H5)-O-)n 102.10  Click
Si 2p Si3N4 102.10  Click
Si 2p SiO0.35N1.1/Si 102.10  Click
Si 2p SiO2(Al2O3)0.22 102.10  Click
Si 2p K0.7(NaCa)0.3(Mg2.84Fe0.02)Al1.2Si2.8O10(OH1.5F0.50) 102.10  Click
Si 2p K0.7(NaCa)0.3(Mg2.84Fe0.02)Al1.2Si2.8O10(OH1.5F0.50) 102.10  Click
Si 2p B17.8Si17.0O47.5N19.1 102.10  Click
Si 2p (-Si(CH3)2O-)n 102.20  Click
Si 2p (-Si(C6H5)(CH3)O-)n 102.20  Click
Si 2p (-Si(C6H5)2O-)n 102.20  Click
Si 2p (MoO3)90(SiO)10 102.20  Click
Si 2p SiO0.7N0.9/Si 102.20  Click
Si 2p SiO2(Al2O3)0.55 102.20  Click
Si 2p SiO2(Al2O3)0.55 102.20  Click
Si 2p SiO1.02 102.20  Click
Si 2p SiO1.05 102.20  Click
Si 2p (SiO2)0.694(Na2O)0.306 102.20  Click
Si 2p Na85.4(AlO2)85.4(SiO2)106.6 102.20  Click
Si 2p (-Si(CH3)2O-)n 102.30  Click
Si 2p (-Si(CH3)2O-)n 102.30  Click
Si 2p Al0.44Si0.41P0.13O2.1 102.30  Click
Si 2p (MoO3)80(SiO)20 102.30  Click
Si 2p CaTiSiO5 102.30  Click
Si 2p K0.9(Mg1.56Fe1.14Ti0.11)Al0.96Si3.0O10(OH1.44F0.56) 102.30  Click
Si 2p K0.9(Mg1.56Fe1.14Ti0.11)Al0.96Si3.0O10(OH1.44F0.56) 102.30  Click
Si 2p Na88Al86Si106O384 102.30  Click
Si 2p C6H9O(CH2)2Si((CH3)2)OSi((CH3)2)OSi((CH3)2)OSi((CH3)2)(CH2)2C6H9O 102.30  Click
Si 2p Ca6(Si6O17)(OH)2 102.30  Click
Si 2p Na69(NH4)13Al82Si110O384 102.30  Click
Si 2p Ca10(PO4)4.4(SiO4)1.24(CO3)0.36(OH)1.12 102.30  Click
Si 2p (-Si(CH3)2O-)n 102.40  Click
Si 2p (-Si(CH3)2O-)n 102.40  Click
Si 2p (-Si(CH3)2O-)n 102.40  Click
Si 2p (-CH2CH(Si(OCH3)3)-)n 102.40  Click
Si 2p (-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n 102.40  Click
Si 2p (-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n 102.40  Click
Si 2p SiO2(Al2O3)0.22 102.40  Click
Si 2p Y2O3/SiO2/Si 102.40  Click
Si 2p Si35O26N38 102.40  Click
Si 2p Si33O44N22 102.40  Click
Si 2p SiO1.19 102.40  Click
Si 2p SiO1.24 102.40  Click
Si 2p NaAlSi2O6.H2O 102.40  Click
Si 2p HSCH2(CH2)9CH(OH)+C18H37SiCl3 102.40  Click
Si 2p (Na,Ca)0.5Fe1.0[Mg1.2Fe1.5Al2.3][Si6.8Al1.2O22](OH)2 102.40  Click
Si 2p (SiO2)55(CaO)21.5(Al2O3)14.5(B2O3)6.0(Na2O)0.8(MgO)0.6(Fe2O3)0.4(TiO2)0.3(F2)0.6(FO2)0.3(K2O)0.1 102.40  Click
Si 2p HOOC-(Si(CH3)2-O-)n-COOH 102.40  Click
Si 2p Na52(NH4)30Al82Si110O384 102.40  Click
Si 2p Na15(NH4)66Al82Si110O384 102.40  Click
Si 2p (-Si(CH3)2O-)n 102.50  Click
Si 2p (Si(CH3)2-O-)n 102.50  Click
Si 2p (MoO3)70(SiO)30 102.50  Click
Si 2p SiF4/Si 102.50  Click
Si 2p SiF4/Si 102.50  Click
Si 2p SiO2(Al2O3)2.1 102.50  Click
Si 2p (MoO3)70(SiO)30 102.60  Click
Si 2p O2/Sr/Si 102.60  Click
Si 2p (-Si(OCH3)2O-)n 102.60  Click
Si 2p Al2Si2O5(OH)4 102.65  Click
Si 2p (MoO3)70(SiO)30 102.70  Click
Si 2p (MoO3)60(SiO)40 102.70  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)11NO2/Si 102.70  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)7C(O)OCH3/Si 102.70  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)7C(O)OH/Si 102.70  Click
Si 2p SiO2(Al2O3)0.55 102.70  Click
Si 2p Al6Si2O13 102.70  Click
Si 2p SiO1.35 102.70  Click
Si 2p Al2SiO5 102.70  Click
Si 2p (MoO3)70(SiO)30 102.80  Click
Si 2p SiO2/Si 102.80  Click
Si 2p (MoO3)50(SiO)50 102.80  Click
Si 2p ZrSiO4 102.80  Click
Si 2p Si32O49N19 102.80  Click
Si 2p SiO1.52 102.80  Click
Si 2p SiO1.49 102.80  Click
Si 2p Na54.5(AlO2)54.5(SiO2)137.5 102.80  Click
Si 2p H3Na45(AlO2)56(SiO2)136 102.80  Click
Si 2p (K,Ca)2[Mg4.3Fe0.7][Si7.2Al0.8O22](OH)2 102.80  Click
Si 2p (Ca1.6Mg0.4)[Mg2.0Fe1.9Al1.0][Si7.2Al0.8O22](OH,Cl) 102.80  Click
Si 2p CH3Si((C6H5)2)OSi(CH3)(C6H5)OSi((C6H5)2)CH3 102.82  Click
Si 2p Al0.35Si0.48P0.16O2.2 102.90  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)11NH2/Si 102.90  Click
Si 2p (-O)3Si(CH2)3NHC(O)(CH2)16CH3/Si 102.90  Click
Si 2p ZrO0.15H2.25Na0.08[(AlO2)2.63(SiO2)93.37] 102.90  Click
Si 2p Na60Al63Si128O384 102.90  Click
Si 2p Ca2[Mg5][Si8O22]OH2 102.90  Click
Si 2p Na26.5H24.5Al51Si141O384 102.90  Click
Si 2p Ca2[Mg5][Si8O22](OH)2 102.90  Click
Si 2p SiO2 103.00  Click
Si 2p SiO2 103.00  Click
Si 2p SiO2/Si 103.00  Click
Si 2p NiSiO3 103.00  Click
Si 2p SiO2(Al2O3)2.1 103.00  Click
Si 2p Ta2O5/Si 103.00  Click
Si 2p Ta2O5/Si 103.00  Click
Si 2p Si/(CH3(CH2)16C(O)O)2Cd 103.00  Click
Si 2p Pt4H7Na41(AlO2)56(SiO2)136 103.00  Click
Si 2p H20Na28(AlO2)56(SiO2)136 103.00  Click
Si 2p Al0.041Si0.264Na0.04K0.02O0.635 103.00  Click
Si 2p H7Na41(AlO2)56(SiO2)136 103.00  Click
Si 2p Pt4H20Na28(AlO2)56(SiO2)136 103.00  Click
Si 2p H11Na37(AlO2)56(SiO2)136 103.00  Click
Si 2p Pt4H3Na45(AlO2)56(SiO2)136 103.00  Click
Si 2p Pt4H11Na37(AlO2)56(SiO2)136 103.00  Click
Si 2p SiO2/Si 103.10  Click
Si 2p SiO2/Si 103.10  Click
Si 2p SiO2 103.10  Click
Si 2p Ta2O5/Si 103.10  Click
Si 2p SiO1.78 103.10  Click
Si 2p SiO2 103.20  Click
Si 2p SiO2 103.20  Click
Si 2p SiO2 103.20  Click
Si 2p SiO2 103.20  Click
Si 2p SiOx 103.20  Click
Si 2p O2/Si 103.20  Click
Si 2p Al0.2Si0.8O2.2 103.20  Click
Si 2p O2/Sr/Si 103.20  Click
Si 2p O2/Sr/Si 103.20  Click
Si 2p O2/Sr/Si 103.20  Click
Si 2p SiO2/Si 103.20  Click
Si 2p SiO2/Si 103.20  Click
Si 2p SiO2 103.20  Click
Si 2p CH3(CH2)17SiCl3/Al 103.20  Click
Si 2p Na5.2(NH4)46.8Al52Si140O384 103.20  Click
Si 2p SiO1.91 103.20  Click
Si 2p B22.5Si18.2O18.5N40.5 103.20  Click
Si 2p Si0.284Zr0.031O0.657F0.028 103.20  Click
Si 2p B17.8Si17.0O47.5N19.1 103.20  Click
Si 2p B22.4Si16.7O24.1N36.5 103.20  Click
Si 2p SiO2/Si 103.22  Click
Si 2p SiOx/Si 103.30  Click
Si 2p SiO2 103.30  Click
Si 2p SiO2/Si 103.30  Click
Si 2p SiO2 103.30  Click
Si 2p SiO2 103.30  Click
Si 2p Na0.6H27.4Al28Si164O384 103.30  Click
Si 2p Si0.251Zr0.074O0.651F0.025 103.30  Click
Si 2p B15.2Si17.9O64.0N3.0 103.30  Click
Si 2p B19.7Si15.2O57.2N7.8 103.30  Click
Si 2p Si0.255Zr0.072O0.665F0.008 103.30  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p (-OCH2CH(CH2O(CH2)3Si(OCH3)3)-)n 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2/Si 103.40  Click
Si 2p SiO2/Si 103.40  Click
Si 2p SiO2/Si 103.40  Click
Si 2p SiO1.9 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p SiO2 103.40  Click
Si 2p O2/Si0.8Ge0.2/Si 103.40  Click
Si 2p Si/O2 103.40  Click
Si 2p SiO2/Al/Mo 103.40  Click
Si 2p SiO2/Si 103.41  Click
Si 2p SiO2/Si 103.49  Click
Si 2p SiO2 103.50  Click
Si 2p SiO2 103.50  Click
Si 2p (-CH2CH(Si(OCH3)3)-)n 103.50  Click
Si 2p (-CH2C((CH3)C(O)O(CH2)3Si(OCH3)3)-)n 103.50  Click
Si 2p SiO2/Si 103.50  Click
Si 2p SiO2 103.50  Click
Si 2p SiO2 103.50  Click
Si 2p SiO2 103.50  Click
Si 2p SiO2 103.50  Click
Si 2p B15.9Si19.0O65.1 103.50  Click
Si 2p Si0.397Ge0.9O0.594 103.50  Click
Si 2p Si0.284Zr0.042O0.656F0.017 103.50  Click
Si 2p Si0.255Zr0.061O0.675F0.008 103.50  Click
Si 2p Si0.294Zr0.029O0.670F0.006 103.50  Click
Si 2p Si0.057Zr0.269O0.597F0.078 103.50  Click
Si 2p Si0.277Zr0.043O0.642F0.038 103.50  Click
Si 2p Si0.314Zr0.012O0.655F0.019 103.50  Click
Si 2p SiOx/Si 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2/Si 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p SiO2 103.60  Click
Si 2p B19.2Si15.3O65.4 103.60  Click
Si 2p Pt/SiO2/Si 103.61  Click
Si 2p Mg2[Mg5][Si8O22]OH2 103.65  Click
Si 2p Mg2[Mg5][Si8O22](OH)2 103.65  Click
Si 2p SiO2/Si 103.67  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2/Si 103.70  Click
Si 2p SiO2/Si 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2 103.70  Click
Si 2p SiO2.05 103.70  Click
Si 2p SiO2.08 103.70  Click
Si 2p Na0.2H7.4Al7.6Si184.4O384 103.70  Click
Si 2p Si0.316Zr0.013O0.664F0.008 103.70  Click
Si 2p Si0.300Zr0.028O0.640F0.032 103.70  Click
Si 2p Si0.322Zr0.005O0.655F0.019 103.70  Click
Si 2p SiO2 103.80  Click
Si 2p SiO2 103.80  Click
Si 2p (-Si(CH3)2O-)n 103.80  Click
Si 2p SiO2 103.80  Click
Si 2p SiO2 103.80  Click
Si 2p SiO2 103.80  Click
Si 2p SiO2 103.80  Click
Si 2p SiO1.8 103.80  Click
Si 2p SiO1.4 103.80  Click
Si 2p SiO0.4 103.80  Click
Si 2p Si0.380Ge0.05O0.615 103.80  Click
Si 2p SiO2 103.90  Click
Si 2p SiO2/Mo 103.90  Click
Si 2p SiO2/Al/Mo 103.90  Click
Si 2p Si0.334O0.649F0.017 103.90  Click
Si 2p Si0.334O0.661F0.005 103.90  Click
Si 2p Si0.328Zr0.001O0.665F0.007 103.90  Click
Si 2p SiOx 104.00  Click
Si 2p O2/Si 104.00  Click
Si 2p SiO2 104.00  Click
Si 2p SiO2 104.00  Click
Si 2p SiO2 104.00  Click
Si 2p SiO2 104.00  Click
Si 2p SiO2 104.00  Click
Si 2p SiO2 104.10  Click
Si 2p Si0.297Ge0.115O0.588 104.50  Click
Si 2p SiF4/Si 105.00  Click
Si 2p SiF4/Si 105.00  Click
Si 2p SiF4/Si 107.70  Click

→  Periodic Table 

Statistical Analysis of Binding Energies in NIST XPS Database of BEs

Six (6) Chemical State Tables of N (1s) BEs

  • The XPS Library Spectra-Base
  • PHI Handbook
  • Thermo-Scientific Website
  • XPSfitting Website
  • Techdb Website
  • NIST Website

Notes of Caution when using Published BEs and BE Tables from Insulators and Conductors:

  • Accuracy of Published BEs
    • The accuracy depends on the calibration BEs used to calibrate the energy scale of the instrument.  Cu (2p3/2) BE can vary from 932.2 to 932.8 eV for old publications
    • Different authors use different BEs for the C (1s) BE of the hydrocarbons found in adventitious carbon that appears on all materials and samples.  From 284.2 to 285.3 eV
    • The accuracy depends on when the authors last checked or adjusted their energy scale to produce the expected calibration BEs
  • Worldwide Differences in Energy Scale calibrations
    • For various reasons authors still use older energy scale calibrations
    • Some authors still adjust their energy scale so Cu (2p3/2) appears at 932.2 eV or 932.8 eV because this is what the maker taught them
    • This range causes BEs in the higher BE end to be larger than expected
    • This variation increases significantly above 600 eV BE
  • Charge Compensation
    • Samples that behave as true insulators normally require the use of a charge neutralizer (electron flood gun with or without Ar+ ions) so that the measured chemical state spectra can be produced without peak-shape distortions or sloping tails on the low BE side of the peak envelop.
    • Floating all samples (conductive, semi-conductive, and non-conductive) and always using the electron flood gun is considered to produce more reliable BEs and is recommended.
  • Charge Referencing Methods for Insulators
    • Charge referencing is a common method, but it can produce results that are less reliable.
    • When an electron flood gun is used, the BE scale will usually shift to lower BE values by 0.01 to 5.0 eV depending on your voltage setting. Normally, to correct for this flood gun induced shift, the BE of the hydrocarbon C (1s) peak maximum from adventitious carbon is used to correct for the charge induced shift.
    • The hydrocarbon peak is normally the largest peak at the lowest BE.
    • Depending on your preference or training, the C (1s) BE assigned to this hydrocarbon peak varies from 284.8 to 285.0 eV.  Other BEs can be as low as 284.2 eV or as high as 285.3 eV
    • Native oxides that still show the pure metal can suffer differential charging that causes the C (1s) and the O (1s) and the Metal Oxide BE to be larger
    • When using the electron flood gun, the instrument operator should adjust the voltage and the XY position of the electron flood gun to produce peaks from a strong XPS signal (eg O (1s) or C (1s) having the most narrow FWHM and the lowest experimentally measured BE.

→  Periodic Table 

Table #1

N (1s) Chemical State BEs from:  “The XPS Library Spectra-Base”

C (1s) BE = 285.0 eV for TXL BEs
and C (1s) BE = 284.8 eV for NIST BEs

Element Atomic # Compound As-Measured by TXL or
NIST Average BE		 Largest BE Hydrocarbon C (1s) BE  Source
N 7 N-Ge 396.5 eV 285.0 eV The XPS Library
N 7 N-In 396.7 eV 285.0 eV The XPS Library
N 7 N-Zr 396.9 eV 285.0 eV The XPS Library
N 7 N-Cr 397.1 eV 285.0 eV The XPS Library
N 7 N-Si 397.1 eV 397.8 eV 285.0 eV The XPS Library
N 7 N-Nb 397.2 eV 285.0 eV The XPS Library
N 7 N-Ti 397.2 eV 397.5 eV 285.0 eV The XPS Library
N 7 N-V 397.2 eV 285.0 eV The XPS Library
N 7 Si3N4 (N*9) 397.4 eV 398.6 eV Avg BE – NIST
N 7 N-Ga 397.5 eV 285.0 eV The XPS Library
N 7 N-Al 397.6 eV 398.0 eV 285.0 eV The XPS Library
N 7 N-Fe 397.7 eV 285.0 eV The XPS Library
N 7 N-W 397.7 eV 398.1 eV 285.0 eV The XPS Library
N 7 SiCN 398.0 eV 285.0 eV The XPS Library
N 7 KCN (N*3) 398.1 eV 399.6 eV Avg BE – NIST
N 7 N-B 398.1 eV 398.3 eV 285.0 eV The XPS Library
N 7 N-B (N*6) 398.1 eV 398.4 eV Avg BE – NIST
N 7 N-Ta 398.2 eV 398.3 eV 285.0 eV The XPS Library
N 7 NaN-N2 (N*4) 398.5 eV 400.1 eV Avg BE – NIST
N 7 CuCN 398.7 eV 285.0 eV The XPS Library
N 7 N-C  amines     (R2NH2) 399.1 eV 400.2 eV 285.0 eV The XPS Library
N 7 N nitrile  (CN) PAN polymer 399.6 eV 285.0 eV The XPS Library
N 7 N-C=O 399.7 eV 400.0 eV 285.0 eV The XPS Library
N 7 NH4-Cl (N*3) 400.8 eV 401.7 eV Avg BE – NIST
N 7 N-O 401.2 eV 402.4 eV 285.0 eV The XPS Library
N 7 (NH4)2-SO4 (N*1) 401.3 eV One BE – NIST
N 7 NH4+,NR4+ 401.4 eV 402.4 eV 285.0 eV The XPS Library
N 7 Me4NCl (N*4) 401.5 eV 402.3 eV Avg BE – NIST
N 7 NH4-NO3 (N*4) 401.9 eV 402.3 eV Avg BE – NIST
N 7 NaN2-N (N*4) 402.8 eV 404.5 eV Avg BE – NIST
N 7 M-NO2 (N*7) 403.3 eV 404.9 eV Avg BE – NIST
N 7 N-O2  (nitrocellulose) 405.4 eV 285.0 eV The XPS Library
N 7 NO3-NH4 (N*4) 405.5 eV 407.3 eV Avg BE – NIST
N 7 M-NO3 (N*14) 407.2 eV 408.1 eV Avg BE – NIST
N 7 N-O3 408.2 eV 285.0 eV The XPS Library

Charge Referencing

  • (N*number) identifies the number of NIST BEs that were averaged to produce the BE in the middle column.
  • Binding Energy Scale calibration expects Cu (2p3/2) BE = 932.62 eV and Au (4f7/2) BE = 83.98 eV.  BE (eV) Uncertainty Range:  +/- 0.2 eV
  • Charge Referencing of insulators is defined such that the Adventitious Hydrocarbon C (1s) BE (eV) = 285.0 eV.  NIST uses C (1s) BE = 284.8 eV 
  • Note:   Ion etching removes adventitious carbon, implants Ar (+), changes conductivity of surface, and degrades chemistry of various chemical states.
  • Note:  Ion Etching changes BE of C (1s) hydrocarbon peak.
  • TXL – abbreviation for: “The XPS Library” (https://xpsLibrary.com).  NIST:  National Institute for Science and Technology (in USA)

→  Periodic Table 

Table #2

N (1s) Chemical State BEs from:  “PHI Handbook”

C (1s) BE = 284.8 eV

→  Periodic Table 

Copyright ©:  Ulvac-PHI

Table #3

N (1s) Chemical State BEs from:  “Thermo-Scientific” Website

C (1s) BE = 284.8 eV

Chemical state Binding energy N (1s) / eV
Metal nitrides ~397
NSi3 (Si3N4) 398.0
NSi2O 399.9
NSiO2 402.5
C-NH2 ~400
Nitrate >405

→  Periodic Table 

Copyright ©:  Thermo Scientific 

Table #4

N (1s) Chemical State BEs from:  “XPSfitting” Website

Chemical State BE Table derived by Averaging BEs in the NIST XPS database of BEs
C (1s) BE = 284.8 eV

→  Periodic Table 

Copyright ©:  Mark Beisinger

Table #5

N (1s) Chemical State BEs from:  “Techdb.podzone.net” Website

XPS Spectra – Chemical Shift | Binding Energy
C (1s) BE = 284.6 eV

XPS(X線光電子分光法)スペクトル 化学状態 化学シフト ケミカルシフト

Element Level Compound B.E.(eV) min max
N 1s Nitride 397.3 ±1.1 396.2 ～ 398.3
N 1s Si3N4 397.5 ±0.4 397.1 ～ 397.8
N 1s BN 398.1 ±0.2 397.9 ～ 398.3
N 1s Azide (N*NN*) 398.4 ±0.5 397.9 ～ 398.8
N 1s Cyanides 398.9 ±1.5 397.4 ～ 400.3
N 1s NH3 399.2 ±0.5 398.7 ～ 399.7
N 1s Organic Matrix 399.9 ±1.1 398.8 ～ 401.0
N 1s Ammonium Salt 401.8 ±1.4 400.4 ～ 403.2
N 1s Azide (NN*N) 402.8 ±0.5 402.3 ～ 403.2
N 1s Nitrites 404.0 ±0.9 403.1 ～ 404.8
N 1s Nitrates 407.6 ±0.6 407.0 ～ 408.2

→  Periodic Table 

 

Histograms of NIST BEs for N (1s) BEs

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

Histogram indicates:  397.1 eV for pure TiN based on 9 literature BEs Histogram indicates:  397.8 eV for Si3N4 based on 30 literature BEs

Histogram indicates:  398.3 eV for pure BN based on 7 literature BEs Histogram indicates:  401.4 eV for pure NH4Cl based on 4 literature BEs

Histogram indicates:  404.2 eV for pure -NO2 based on 5 literature BEs Histogram indicates:  406.6 eV for pure -NO3 based on 6 literature BEs

Table #6


NIST Database of N (1s) Binding Energies

NIST Standard Reference Database 20, Version 4.1

Data compiled and evaluated
by
Alexander V. Naumkin, Anna Kraut-Vass, Stephen W. Gaarenstroom, and Cedric J. Powell
©2012 copyright by the U.S. Secretary of Commerce on behalf of the United States of America. All rights reserved.

Important Note:  NIST Database defines Adventitious Hydrocarbon C (1s) BE = 284.8 eV for all insulators.

To view the NIST table of BEs for N (1s) click on the link above.

→  Periodic Table 

Statistical Analysis of Binding Energies in NIST XPS Database of BEs